Presentation | 2011-05-19 Antiphase domains in GaP grown on Si substrates using metalorganic vapor phase epitaxy Yasushi TAKANO, Tatsuya TAKAGI, Tatsuru MISAKI, Ryo MIYAHARA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | GaP layers were grown on 2° and 4° misoriented Si substrates using metalorganic vapor phase epitaxy. The misoriented substrates were used to suppress antiphase domains. Single domain GaP layers were obtained on 4° misoriented Si substrates. Antiphase domains self-annihilated during growth. A single domain GaP layer was achieved on the 2° misoriented Si substrates only at 800℃. Transmission electron microscopy revealed that the sublattice of the layer on the 2° misoriented substrate rotated 90° with respect to that on the 4° misoriented substrates. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | MOVPE / GaP / Si substrate / antiphase domain / atomic force microscopy / transmission electron microscopy |
Paper # | ED2011-15,CPM2011-22,SDM2011-28 |
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Conference Information | |
Committee | CPM |
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Conference Date | 2011/5/12(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Antiphase domains in GaP grown on Si substrates using metalorganic vapor phase epitaxy |
Sub Title (in English) | |
Keyword(1) | MOVPE |
Keyword(2) | GaP |
Keyword(3) | Si substrate |
Keyword(4) | antiphase domain |
Keyword(5) | atomic force microscopy |
Keyword(6) | transmission electron microscopy |
1st Author's Name | Yasushi TAKANO |
1st Author's Affiliation | Faculty of Engineering, Shizuoka University() |
2nd Author's Name | Tatsuya TAKAGI |
2nd Author's Affiliation | Faculty of Engineering, Shizuoka University |
3rd Author's Name | Tatsuru MISAKI |
3rd Author's Affiliation | Faculty of Engineering, Shizuoka University |
4th Author's Name | Ryo MIYAHARA |
4th Author's Affiliation | Faculty of Engineering, Shizuoka University |
Date | 2011-05-19 |
Paper # | ED2011-15,CPM2011-22,SDM2011-28 |
Volume (vol) | vol.111 |
Number (no) | 45 |
Page | pp.pp.- |
#Pages | 5 |
Date of Issue |