Presentation 2011-05-20
Adaptively-controlled holographic femtosecond laser processing system
Satoshi HASEGAWA, Yoshio HAYASAKI,
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Abstract(in English) Holographic femtosecond laser processing has the advantages of high throughout and high light-utilization efficiency of a laser pulse energy by shaping the laser pulse into an arbitrary optical intensity pattern with use of a computer-generated hologram displayed on a spatial light modulator. In holographic femtosecond laser processing, an adaptive control of the processing system is important for fabricating enormous numbers of nanometer-scale structures efficiently and precisely. In this paper, we demonstrated an optimization of the hologram and a correction of wavefront aberration in the optical system based on the adaptive control.
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Keyword(in English) Femtosecond laser processing / Spatial light modulator / Computer-generated hologram / Adaptive optics
Paper # LQE2011-14
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Committee LQE
Conference Date 2011/5/13(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Adaptively-controlled holographic femtosecond laser processing system
Sub Title (in English)
Keyword(1) Femtosecond laser processing
Keyword(2) Spatial light modulator
Keyword(3) Computer-generated hologram
Keyword(4) Adaptive optics
1st Author's Name Satoshi HASEGAWA
1st Author's Affiliation Center for Optical Research and Education, Utsunomiya University()
2nd Author's Name Yoshio HAYASAKI
2nd Author's Affiliation Center for Optical Research and Education, Utsunomiya University
Date 2011-05-20
Paper # LQE2011-14
Volume (vol) vol.111
Number (no) 56
Page pp.pp.-
#Pages 6
Date of Issue