| Presentation | 2011-05-20 Imaging of femtosecond laser ablation process by using coherent soft X-ray Takuro TOMITA, Kota TERAKAWA, Minoru YAMAMOTO, Noboru HASEGAWA, Yasuo MINAMI, Masaharu NISHIKINO, Yoshihiro OCHI, Takeshi KAIHORI, Tetsuya KAWACHI, Mitsuru YAMAGIWA, Tohru SUEMOTO, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We report the result of the time-resolved imaging of femtosecond laser ablation process by using the short pulsed coherent soft X-ray light source developed in Japan Atomic Energy Agency. We obtained the interference pattern by overlapping two soft X-ray beams which are divided by the Lloyd's mirror system. By using this optical system, the lateral resolution of 1.8 μm and the depth resolution of 1 nm have been achieved. The ablation process has been successfully observed by irradiating the femtosecond laser pulses onto the surface of the samples. From this measurement, transient dilatation and the nanometer-scaled final subsidence were observed at the outside region of the ablation crater. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | femtosecond laser ablation / coherent soft X-ray / interferometer |
| Paper # | LQE2011-13 |
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| Committee | LQE |
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| Conference Date | 2011/5/13(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Imaging of femtosecond laser ablation process by using coherent soft X-ray |
| Sub Title (in English) | |
| Keyword(1) | femtosecond laser ablation |
| Keyword(2) | coherent soft X-ray |
| Keyword(3) | interferometer |
| 1st Author's Name | Takuro TOMITA |
| 1st Author's Affiliation | Faculty of Engineering, The University of Tokushima() |
| 2nd Author's Name | Kota TERAKAWA |
| 2nd Author's Affiliation | Institute for Solid State Physics, The University of Tokyo |
| 3rd Author's Name | Minoru YAMAMOTO |
| 3rd Author's Affiliation | Faculty of Engineering, The University of Tokushima |
| 4th Author's Name | Noboru HASEGAWA |
| 4th Author's Affiliation | Quantum Beam Science Directorate, Japan Atomic Energy Agency |
| 5th Author's Name | Yasuo MINAMI |
| 5th Author's Affiliation | Institute for Solid State Physics, The University of Tokyo |
| 6th Author's Name | Masaharu NISHIKINO |
| 6th Author's Affiliation | Quantum Beam Science Directorate, Japan Atomic Energy Agency |
| 7th Author's Name | Yoshihiro OCHI |
| 7th Author's Affiliation | Quantum Beam Science Directorate, Japan Atomic Energy Agency |
| 8th Author's Name | Takeshi KAIHORI |
| 8th Author's Affiliation | Quantum Beam Science Directorate, Japan Atomic Energy Agency |
| 9th Author's Name | Tetsuya KAWACHI |
| 9th Author's Affiliation | Quantum Beam Science Directorate, Japan Atomic Energy Agency |
| 10th Author's Name | Mitsuru YAMAGIWA |
| 10th Author's Affiliation | Quantum Beam Science Directorate, Japan Atomic Energy Agency |
| 11th Author's Name | Tohru SUEMOTO |
| 11th Author's Affiliation | Quantum Beam Science Directorate, Japan Atomic Energy Agency |
| Date | 2011-05-20 |
| Paper # | LQE2011-13 |
| Volume (vol) | vol.111 |
| Number (no) | 56 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |