| Presentation | 2011-03-28 Infinite Hidden Markov Random Field Model and Its Application to Semiconductor Manufacturing Data Ryusei SHINGAKI, Ken UENO, Shizu SAKAKIBARA, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Semiconductor manufacturing is a time-consuming and costly process involving many test steps. In this paper, we apply an infinite hidden Markov random field model to some wafer bin map (WBM) data on the wafer and extract the whole spatial dependency on the wafer. Our method allows to test few chips on the wafer so that reduce the test cost. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | infinite Hidden Markov Random Field / Semiconductor Manufacturing / Wafer Bin Maps |
| Paper # | IBISML2010-104 |
| Date of Issue |
| Conference Information | |
| Committee | IBISML |
|---|---|
| Conference Date | 2011/3/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Information-Based Induction Sciences and Machine Learning (IBISML) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Infinite Hidden Markov Random Field Model and Its Application to Semiconductor Manufacturing Data |
| Sub Title (in English) | |
| Keyword(1) | infinite Hidden Markov Random Field |
| Keyword(2) | Semiconductor Manufacturing |
| Keyword(3) | Wafer Bin Maps |
| 1st Author's Name | Ryusei SHINGAKI |
| 1st Author's Affiliation | System Engineering Laboratory, Corporate Research & Development Center, Toshiba Corporation() |
| 2nd Author's Name | Ken UENO |
| 2nd Author's Affiliation | System Engineering Laboratory, Corporate Research & Development Center, Toshiba Corporation |
| 3rd Author's Name | Shizu SAKAKIBARA |
| 3rd Author's Affiliation | System Engineering Laboratory, Corporate Research & Development Center, Toshiba Corporation |
| Date | 2011-03-28 |
| Paper # | IBISML2010-104 |
| Volume (vol) | vol.110 |
| Number (no) | 476 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |