| Presentation | 2010-12-17 Wavelength Control of VCSELs with a Thermally Actuated MEMS Structure Hayato SANO, Norihiko NAKATA, Masanori NAKAHAMA, Akihiro MATSUTANI, Fumio KOYAMA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | VCSELs with a thermally actuated cantilever enables us to control the temperature dependence of lasing wavelengths. We demonstrate the first widely controlled temperature dependence using a thermally actuated cantilever with or without SiO_2. The temperature dependence of wavelengths is successfully controlled from・0.15nm/K to 0.32nm/K. Also we demonstrate the wavelength trimming of MEMS VCSELs for post-process precise wavelength allocation of athermal MEMS VCSELs. Experimental results show that it is possible to realize both red-shift and blue-shift wavelength changes by choosing the etching area of the cantilever. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | VCSEL / MEMS / Wavelength trimming |
| Paper # | LQE2010-114 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2010/12/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Wavelength Control of VCSELs with a Thermally Actuated MEMS Structure |
| Sub Title (in English) | |
| Keyword(1) | VCSEL |
| Keyword(2) | MEMS |
| Keyword(3) | Wavelength trimming |
| 1st Author's Name | Hayato SANO |
| 1st Author's Affiliation | P&I Lab., Tokyo Institute of Technology() |
| 2nd Author's Name | Norihiko NAKATA |
| 2nd Author's Affiliation | P&I Lab., Tokyo Institute of Technology |
| 3rd Author's Name | Masanori NAKAHAMA |
| 3rd Author's Affiliation | P&I Lab., Tokyo Institute of Technology |
| 4th Author's Name | Akihiro MATSUTANI |
| 4th Author's Affiliation | P&I Lab., Tokyo Institute of Technology |
| 5th Author's Name | Fumio KOYAMA |
| 5th Author's Affiliation | P&I Lab., Tokyo Institute of Technology |
| Date | 2010-12-17 |
| Paper # | LQE2010-114 |
| Volume (vol) | vol.110 |
| Number (no) | 353 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |