Presentation | 2010-12-17 Frequency response of amorphous silicon photoconductor Hideyuki OTOSAKA, Takeshi KAWAHARA, Takeo MARUYAMA, Koichi IIYAMA, Keisuke OHDAIRA, Hideki MATHUMURA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We fabricated an amorphous silicon (a-Si) photoconductor and measured a sensitivity and frequency characteristics at a wavelength of 650nm. a-Si layers are deposited by the catalytic chemical vapor deposition (Cat-CVD). The electrodes are patterned by the photolithography and the liftoff process. The electrodes pattern is formed by comb structure, the receiving area of 50μm×50μm and the electrode width of 1μm. The sensitivity of 4.6mA/W and the maximum bandwidth of 18MHz were obtained at the wavelength of 650 nm and the bias voltage of 50V. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | photoconductor / amorphous silicon / frequency response / Cat-CVD |
Paper # | OPE2010-135 |
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Committee | OPE |
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Conference Date | 2010/12/10(1days) |
Place (in Japanese) | (See Japanese page) |
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Registration To | Optoelectronics (OPE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Frequency response of amorphous silicon photoconductor |
Sub Title (in English) | |
Keyword(1) | photoconductor |
Keyword(2) | amorphous silicon |
Keyword(3) | frequency response |
Keyword(4) | Cat-CVD |
1st Author's Name | Hideyuki OTOSAKA |
1st Author's Affiliation | Kanazawa Univ. Graduate School of Natural Science & Technology() |
2nd Author's Name | Takeshi KAWAHARA |
2nd Author's Affiliation | Kanazawa Univ. Graduate School of Natural Science & Technology |
3rd Author's Name | Takeo MARUYAMA |
3rd Author's Affiliation | Kanazawa Univ. Graduate School of Natural Science & Technology |
4th Author's Name | Koichi IIYAMA |
4th Author's Affiliation | Kanazawa Univ. Graduate School of Natural Science & Technology |
5th Author's Name | Keisuke OHDAIRA |
5th Author's Affiliation | Japan Advanced Institute of Science and Technology School of Materials Science |
6th Author's Name | Hideki MATHUMURA |
6th Author's Affiliation | Japan Advanced Institute of Science and Technology School of Materials Science |
Date | 2010-12-17 |
Paper # | OPE2010-135 |
Volume (vol) | vol.110 |
Number (no) | 352 |
Page | pp.pp.- |
#Pages | 4 |
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