| Presentation | 2010-12-16 Enhancing the Resolution of Millimeter-Wave Microscopy Using a Metal Slit-Type Probe Noriyuki MIYASAKA, Tatsuo NOZOKIDO, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A novel type of slit probe incorporating a micromachined silicon (Si) chip for millimeter-wave scanning near-field microscopy is proposed. In order to improve the spatial resolution and image contrast attainable in millimeter-wave microscopy, a metal-coated Si chip with a micro-slit aperture fabricated using a bulk micromachining technique was attached to the tip of an ordinary slit-type probe at the end of a tapered rectangular waveguide. The design and fabrication of the Si chip are described and the results from experiments performed at U-band (40-60 GHz) frequencies to demonstrate the feasibility of this new probe configuration are presented. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Bulk micromachining / millimeter-wave imaging / near-field probes / scanning near-field microscopy |
| Paper # | MW2010-127 |
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| Conference Information | |
| Committee | MW |
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| Conference Date | 2010/12/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Microwaves (MW) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Enhancing the Resolution of Millimeter-Wave Microscopy Using a Metal Slit-Type Probe |
| Sub Title (in English) | |
| Keyword(1) | Bulk micromachining |
| Keyword(2) | millimeter-wave imaging |
| Keyword(3) | near-field probes |
| Keyword(4) | scanning near-field microscopy |
| 1st Author's Name | Noriyuki MIYASAKA |
| 1st Author's Affiliation | Graduate School of Science and Engineering for Research, University of Toyama() |
| 2nd Author's Name | Tatsuo NOZOKIDO |
| 2nd Author's Affiliation | Graduate School of Science and Engineering for Research, University of Toyama |
| Date | 2010-12-16 |
| Paper # | MW2010-127 |
| Volume (vol) | vol.110 |
| Number (no) | 343 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |