Presentation 2011-01-20
Basic research on improvement of characteristics of anti cavitation hydrophone by deposition of hydrothermally synthesized PZT poly-crystalline film on reverse surface of Ti acoustic receiving film
Shinichi TAKEUCHI, Kazuho YOSHIMURA, Hitomi YAGI, Norimichi KAWASHIMA, Takeyoshi UCHIDA, Tsuneo KIKUCHI, Minoru K. KUROSAWA,
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Abstract(in English) We developed the original hydrophone with hydrothermally synthesized PZT poly-crystalline film deposited on a reverse surface of a Ti film front layer as protection layer, acoustic receiving layer and GND electrode in order to realize an anti cavitation hydrophone. Our hydrophone could be used in the high intensity ultrasound field with generation of acoustic cavitation such as focal area of HIFU treatment equipment and in a vessel of an ultrasound cleaner without broken. However, we observed the output waveform of the hydrophone without nonlinear distortion in spite of measurement in high intensity ultrasound field like focal area of HIFU treatment equipment. We considered on the cause of above problem by numerical simulation with MASON's equivalent circuit and one dimensional acoustic transmission model. As results, it was found that the hydrophone with thinner Ti front layer has wider frequency characteristics of receiving sensitivity. We can expect higher fidelity of received waveform with nonlinear distortion and nonlinear harmonic components by using anti cavitation hydrophone with Ti film front layer with thickness thinner than 5μm.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Anti caitation hydrophone / Ti film / hydrothermally synthesized PZT poly-crystalline film / Ti acoustic receiving film / Numerical simulation / Equivalent circuit
Paper # US2010-94
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Committee US
Conference Date 2011/1/13(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Basic research on improvement of characteristics of anti cavitation hydrophone by deposition of hydrothermally synthesized PZT poly-crystalline film on reverse surface of Ti acoustic receiving film
Sub Title (in English)
Keyword(1) Anti caitation hydrophone
Keyword(2) Ti film
Keyword(3) hydrothermally synthesized PZT poly-crystalline film
Keyword(4) Ti acoustic receiving film
Keyword(5) Numerical simulation
Keyword(6) Equivalent circuit
1st Author's Name Shinichi TAKEUCHI
1st Author's Affiliation Department of Clinical Engineering, Faculty of Clinical Engineering, Toin University of Yokohama()
2nd Author's Name Kazuho YOSHIMURA
2nd Author's Affiliation Department of Clinical Engineering, Faculty of Clinical Engineering, Toin University of Yokohama
3rd Author's Name Hitomi YAGI
3rd Author's Affiliation Department of Clinical Engineering, Faculty of Clinical Engineering, Toin University of Yokohama
4th Author's Name Norimichi KAWASHIMA
4th Author's Affiliation Department of Clinical Engineering, Faculty of Clinical Engineering, Toin University of Yokohama
5th Author's Name Takeyoshi UCHIDA
5th Author's Affiliation National Metrogy Institute of Japan, National Institute of Advanced Industrial Science and Technology
6th Author's Name Tsuneo KIKUCHI
6th Author's Affiliation National Metrogy Institute of Japan, National Institute of Advanced Industrial Science and Technology
7th Author's Name Minoru K. KUROSAWA
7th Author's Affiliation Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology
Date 2011-01-20
Paper # US2010-94
Volume (vol) vol.110
Number (no) 366
Page pp.pp.-
#Pages 6
Date of Issue