| Presentation | 2010-12-10 Fundamental study of crystalline orientation control by collimated sputtering Naoki HONDA, Akito HONDA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Fundamental investigation was performed for crystalline orientation control by collimated sputtering with the purpose of obtaining inclined anisotropy media. Enhancement effect of crystalline orientation by the collimator was observed for perpendicular orientation of hcp c-axis of Co-Cr alloy and Ru films. However, only small inclined angles of less than 2 degrees were obtained with inclined deposition using inclined collimators though the collimator angle was increased as large as 45 degrees. Further detailed study is required to obtain an inclined orientation film. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Collimated sputtering / Inclined deposition / Crystalline orientation / Magnetic recording media / Co-Cr alloy |
| Paper # | MR2010-51 |
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| Conference Information | |
| Committee | MR |
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| Conference Date | 2010/12/2(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Magnetic Recording (MR) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fundamental study of crystalline orientation control by collimated sputtering |
| Sub Title (in English) | |
| Keyword(1) | Collimated sputtering |
| Keyword(2) | Inclined deposition |
| Keyword(3) | Crystalline orientation |
| Keyword(4) | Magnetic recording media |
| Keyword(5) | Co-Cr alloy |
| 1st Author's Name | Naoki HONDA |
| 1st Author's Affiliation | Faculty of Engineering, Tohoku Institute of Technology() |
| 2nd Author's Name | Akito HONDA |
| 2nd Author's Affiliation | Faculty of Engineering, Tohoku Institute of Technology |
| Date | 2010-12-10 |
| Paper # | MR2010-51 |
| Volume (vol) | vol.110 |
| Number (no) | 329 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |