Presentation | 2010-11-11 GaN growth on pseudo (111)Al substrates by RF-MBE Tohru HONDA, Masato HAYASHI, Taiga GOTO, Tatsuhiro IGAKI, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Fabrication of integrated light-emitting devices based on GaN requires a vertical carrier injection. In the case, GaN growth on metal substrates is one of the solutions. Epitaxial growth of (111)Al on (0001)sapphire was investigated for the application to pseudo Al substrates for the III-V growth. At the growth temperatures around 200℃, the Epitaxial growth was achieved. Its atomic force microscopy (AFM) images indicated that the surface morphology of the (111)Al layer was smooth compared with that of bulky (111)Al substrates with chemical polishing treatment. The surface nitridation was also investigated. At the temperature of 350℃, streaky RHEED patterns were observed. Those results clarified that the pseudo Al substrates grown by MBE was suitable for the substrates using the III-V growth. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | gallium nitride / GaN / Al substrate / MBE |
Paper # | ED2010-144,CPM2010-110,LQE2010-100 |
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Conference Information | |
Committee | LQE |
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Conference Date | 2010/11/4(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | GaN growth on pseudo (111)Al substrates by RF-MBE |
Sub Title (in English) | |
Keyword(1) | gallium nitride |
Keyword(2) | GaN |
Keyword(3) | Al substrate |
Keyword(4) | MBE |
1st Author's Name | Tohru HONDA |
1st Author's Affiliation | Graduate School of Engineering, Kogakuin University() |
2nd Author's Name | Masato HAYASHI |
2nd Author's Affiliation | Graduate School of Engineering, Kogakuin University |
3rd Author's Name | Taiga GOTO |
3rd Author's Affiliation | Graduate School of Engineering, Kogakuin University |
4th Author's Name | Tatsuhiro IGAKI |
4th Author's Affiliation | Graduate School of Engineering, Kogakuin University |
Date | 2010-11-11 |
Paper # | ED2010-144,CPM2010-110,LQE2010-100 |
Volume (vol) | vol.110 |
Number (no) | 273 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |