Presentation 2010-11-11
High-Power GaN-HEMT for Millimeter-Wave Amplifier
Kozo MAKIYAMA, Toshihiro OHKI, Naoya OKAMOTO, Masahito KANAMURA, Satoshi MASUDA, Yasuhiro NAKASHA, Kazukiyo JOSHIN, Kenji IMANISHI, Naoki HARA, Shiro OZAKI, Norikazu NAKAMURA, Toshihide KIKKAWA,
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Abstract(in English) There are high expectations for a GaN high electron mobility transistor (GaN-HEMT) to serve as a key device in the production of a high power and high efficiency millimeter-wave amplifier. Until now, an extremely low three-terminal pinched-off-current of less than 10^<-6> A/mm was achieved by applying band engineering. It improved the on-state breakdown voltage to 50 V and the off-state breakdown voltage to over 100 V. However, the output power of a GaN-HEMT decreases due to current collapse. In particular, the influence of current collapse increases in a GaN-HEMT with a short gate-length. In this work, technology was developed to reduce this amount of current collapse. By utilizing thin silicon nitride passivation film that contained many Si-H bonds, current collapse was remarkably improved. A 3-stage common source amplifier MMIC was fabricated that used current collapse reducing technology. The P_ vs. P_ characteristics were measured at the W-band. Excellent power characteristics, such as P_ of 1.3 W, 1.6W/mm at 75 GHz at 35 V operation, and a frequency bandwidth of 13 GHz were demonstrated.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) GaN-HEMT / Millimeter wave / Amplifier / Current collapse / Silicon nitride
Paper # ED2010-153,CPM2010-119,LQE2010-109
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Conference Information
Committee CPM
Conference Date 2010/11/4(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) High-Power GaN-HEMT for Millimeter-Wave Amplifier
Sub Title (in English)
Keyword(1) GaN-HEMT
Keyword(2) Millimeter wave
Keyword(3) Amplifier
Keyword(4) Current collapse
Keyword(5) Silicon nitride
1st Author's Name Kozo MAKIYAMA
1st Author's Affiliation Fujitsu Limited:Fujitsu Laboratories Ltd.()
2nd Author's Name Toshihiro OHKI
2nd Author's Affiliation Fujitsu Limited:Fujitsu Laboratories Ltd.
3rd Author's Name Naoya OKAMOTO
3rd Author's Affiliation Fujitsu Limited:Fujitsu Laboratories Ltd.
4th Author's Name Masahito KANAMURA
4th Author's Affiliation Fujitsu Limited:Fujitsu Laboratories Ltd.
5th Author's Name Satoshi MASUDA
5th Author's Affiliation Fujitsu Limited:Fujitsu Laboratories Ltd.
6th Author's Name Yasuhiro NAKASHA
6th Author's Affiliation Fujitsu Limited:Fujitsu Laboratories Ltd.
7th Author's Name Kazukiyo JOSHIN
7th Author's Affiliation Fujitsu Limited:Fujitsu Laboratories Ltd.
8th Author's Name Kenji IMANISHI
8th Author's Affiliation Fujitsu Limited:Fujitsu Laboratories Ltd.
9th Author's Name Naoki HARA
9th Author's Affiliation Fujitsu Laboratories Ltd.
10th Author's Name Shiro OZAKI
10th Author's Affiliation Fujitsu Laboratories Ltd.
11th Author's Name Norikazu NAKAMURA
11th Author's Affiliation Fujitsu Laboratories Ltd.
12th Author's Name Toshihide KIKKAWA
12th Author's Affiliation Fujitsu Limited:Fujitsu Laboratories Ltd.
Date 2010-11-11
Paper # ED2010-153,CPM2010-119,LQE2010-109
Volume (vol) vol.110
Number (no) 272
Page pp.pp.-
#Pages 4
Date of Issue