Presentation | 2010-11-11 ELO-AlN on trench-patterned AlN/sapphire by low-pressure HVPE Kohei FUJITA, Hideto MIYAKE, Kazumasa HIRAMATSU, Jyun NORIMATSU, Hideki HIRAYAMA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have fabricated crack-free thick AlN films with low threading dislocation density (TDD) on trench-patterned AlN/Sapphire substrates for application to deep-ultraviolet (DUV) light-emitting diodes (LEDs) by low-pressure hydride vapor phase epitaxy (LP-HVPE). We systematically investigated mechanism of void structure formed by the epitaxial lateral overgrowth (ELO) process. It was found that the height of void-tops was proportional to the groove width and the growth rate ratio of vertical to lateral. And, the height of void-bottoms was proportional to the parameter defined as the square of groove-width devided by the groove-depth. Furthermore, the growth rate ratio of vertical to lateral increased with increasing growth temperature or increasing V/III ratio. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | HVPE / AlN / ELO / crack-free |
Paper # | ED2010-147,CPM2010-113,LQE2010-103 |
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Conference Information | |
Committee | CPM |
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Conference Date | 2010/11/4(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | ELO-AlN on trench-patterned AlN/sapphire by low-pressure HVPE |
Sub Title (in English) | |
Keyword(1) | HVPE |
Keyword(2) | AlN |
Keyword(3) | ELO |
Keyword(4) | crack-free |
1st Author's Name | Kohei FUJITA |
1st Author's Affiliation | Faculty of Engineering, Mie University() |
2nd Author's Name | Hideto MIYAKE |
2nd Author's Affiliation | Faculty of Engineering, Mie University |
3rd Author's Name | Kazumasa HIRAMATSU |
3rd Author's Affiliation | Faculty of Engineering, Mie University |
4th Author's Name | Jyun NORIMATSU |
4th Author's Affiliation | RIKEN |
5th Author's Name | Hideki HIRAYAMA |
5th Author's Affiliation | RIKEN |
Date | 2010-11-11 |
Paper # | ED2010-147,CPM2010-113,LQE2010-103 |
Volume (vol) | vol.110 |
Number (no) | 272 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |