| Presentation | 2010-09-10 Fabrication of Poly-Si Thin Film Transistor on Piezo-Electric Film Kosuke OKADA, Shinichiro MITO, Ryosuke ISOGAI, Hiroyuki TAKAGI, Mitsuteru INOUE, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Spatial phase modulation of light, in which the phase of travelling optical wave is modulated in a two-dimensional pixel image. Recently, we developed voltage driving for the MOSLM with one-dimensional reflection type magneto-photonic crystal (MFC) structure. The MOSLM is driven by a stress from PZT film. In this study, we formed poly-Si TFT for active matrix driven method and we discuss about the performances of TFT. The drain current of the fabricated TFT is short to turn on the PZT pixel within a few microseconds. On the other hand, the brake down voltage of the TFT was over 30V. This voltage is enough to drive the Voltage driven type MOSLM. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | poly-Si TFT / PZT / MOSLM / piezoelectric actuation / MPC |
| Paper # | CPM2010-86 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2010/9/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of Poly-Si Thin Film Transistor on Piezo-Electric Film |
| Sub Title (in English) | |
| Keyword(1) | poly-Si TFT |
| Keyword(2) | PZT |
| Keyword(3) | MOSLM |
| Keyword(4) | piezoelectric actuation |
| Keyword(5) | MPC |
| 1st Author's Name | Kosuke OKADA |
| 1st Author's Affiliation | Toyohashi University of Technology() |
| 2nd Author's Name | Shinichiro MITO |
| 2nd Author's Affiliation | Toyohashi University of Technology |
| 3rd Author's Name | Ryosuke ISOGAI |
| 3rd Author's Affiliation | Toyohashi University of Technology |
| 4th Author's Name | Hiroyuki TAKAGI |
| 4th Author's Affiliation | Toyota National College of Technology |
| 5th Author's Name | Mitsuteru INOUE |
| 5th Author's Affiliation | Toyohashi University of Technology |
| Date | 2010-09-10 |
| Paper # | CPM2010-86 |
| Volume (vol) | vol.110 |
| Number (no) | 202 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |