| Presentation | 2010-10-22 Deposition Polymerization of Fluoropolymer Thin Films by Ion-Assisted Vapor Deposition Tsuyoshi MATSUDA, Kazuo SENDA, Kuniaki TANAKA, Hiroaki USUI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Ion-assisted deposition was employed as a new technique for preparing fuluoropolymer thin films. A fluorinated alkylacrylate monomer was deposited on the substrate surface under irradiation of low energy Ar ions. As a consequence, highly hydrophobic fluoropolymer thin films were obtained. However, no films were accumulated when the monomer was deposited without ion irradiation. The films deposited on Au surface had excellent smoothness. On the other hand, the films deposited on glass substrate had considerable extrusions due probably to coagulation of monomer residue. The roughness was improved by rinsing the film with HCFC-225 solvent. By depositing a 100-nm thick film on glass surface, the reflectance was reduced from 8% to 3%. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ion-assisted deposition / deposition polymerization / fluoropolymer / fluorinated alkylacrylate / antireflective coating |
| Paper # | OME2010-47 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2010/10/15(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Deposition Polymerization of Fluoropolymer Thin Films by Ion-Assisted Vapor Deposition |
| Sub Title (in English) | |
| Keyword(1) | ion-assisted deposition |
| Keyword(2) | deposition polymerization |
| Keyword(3) | fluoropolymer |
| Keyword(4) | fluorinated alkylacrylate |
| Keyword(5) | antireflective coating |
| 1st Author's Name | Tsuyoshi MATSUDA |
| 1st Author's Affiliation | Tokyo University of Agriculture and Technology() |
| 2nd Author's Name | Kazuo SENDA |
| 2nd Author's Affiliation | Sumitomo Precision Products. Co., Ltd. |
| 3rd Author's Name | Kuniaki TANAKA |
| 3rd Author's Affiliation | Tokyo University of Agriculture and Technology |
| 4th Author's Name | Hiroaki USUI |
| 4th Author's Affiliation | Tokyo University of Agriculture and Technology |
| Date | 2010-10-22 |
| Paper # | OME2010-47 |
| Volume (vol) | vol.110 |
| Number (no) | 243 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |