| Presentation | 2010-10-29 Examination of ITO Thin Films Deposited at Low-temperature for OLEDs by Sputtering Method Yohei NAKAMURA, Chag LIU, Hidehiko SHIMIZU, Haruo IWANO, Yasuo FUKUSHIMA, Kotaro NAGATA, Yoichi HOSHI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In order to examine problems of the ITO films deposited at the low-temperature, the ITO films was deposited at the low-temperature by combined unbalanced magnetron sputtering method and substrate bias sputtering method. The ITO films deposited at the low-temperature were applied to the organic light emitting diode (OLED). As a result, The crystallinity of the ITO films improved as substrate bias voltage decreases. But, The resistivity of the ITO films did not improve as substrate bias voltage decreases. The characteristic of the voltage-current density and the voltage-luminescence of OLEDs with ITO films deposited at the low-temperature were not good. Therefore, the ITO films prepared in this study were insufficient for the electrode of the OLEDs. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | OLEDs / ITO thin film / low temperature / Unbalanced magnetron sputtering method |
| Paper # | CPM2010-105 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2010/10/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Examination of ITO Thin Films Deposited at Low-temperature for OLEDs by Sputtering Method |
| Sub Title (in English) | |
| Keyword(1) | OLEDs |
| Keyword(2) | ITO thin film |
| Keyword(3) | low temperature |
| Keyword(4) | Unbalanced magnetron sputtering method |
| 1st Author's Name | Yohei NAKAMURA |
| 1st Author's Affiliation | Graduate School of Science and Technology, Niigata University() |
| 2nd Author's Name | Chag LIU |
| 2nd Author's Affiliation | Graduate School of Science and Technology, Niigata University |
| 3rd Author's Name | Hidehiko SHIMIZU |
| 3rd Author's Affiliation | Faculty of Engineering, Niigata University |
| 4th Author's Name | Haruo IWANO |
| 4th Author's Affiliation | Faculty of Engineering, Niigata University |
| 5th Author's Name | Yasuo FUKUSHIMA |
| 5th Author's Affiliation | Faculty of Engineering, Niigata University |
| 6th Author's Name | Kotaro NAGATA |
| 6th Author's Affiliation | Faculty of Engineering, Niigata University |
| 7th Author's Name | Yoichi HOSHI |
| 7th Author's Affiliation | Faculty of Engineering, Tokyo Polytechnic University |
| Date | 2010-10-29 |
| Paper # | CPM2010-105 |
| Volume (vol) | vol.110 |
| Number (no) | 261 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |