| Presentation | 2010-10-19 Electric Characteristics of NbN Tunnel Junctions with Plasuma-Nitrided AlNx Barriers Naoto NAITO, Tatsunori FUNAI, Chikaze MARUYAMA, Hiroyuki AKAIKE, Akira FUJIMAKI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We present the preparation process of plasma-nitrided AlNx barriers for NbN tunnel junctions and the electrical characteristics of the junctions. Our aim is to apply the junctions to electromagnetic wave detectors (SIS mixer, direct detector). To fabricate high-quality junctions suitable for the detectors, it is important to clarify physical mechanism for AlNx barrier formation. In this work, we have fabricated the NbN tunnel junctions using two different methods of plasma-nitridation and compared the electrical characteristics of the junctions. In the case of Radical-nitridation, junctions showed current-voltage characteristics with low leakage currents. The critical current density J_c and quality parameter R_ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Plasma-Nitridation / AlNx / NbN tunnel junction |
| Paper # | SCE2010-26 |
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| Conference Information | |
| Committee | SCE |
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| Conference Date | 2010/10/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Electric Characteristics of NbN Tunnel Junctions with Plasuma-Nitrided AlNx Barriers |
| Sub Title (in English) | |
| Keyword(1) | Plasma-Nitridation |
| Keyword(2) | AlNx |
| Keyword(3) | NbN tunnel junction |
| 1st Author's Name | Naoto NAITO |
| 1st Author's Affiliation | Department of Quantum Engineering, Nagoya University() |
| 2nd Author's Name | Tatsunori FUNAI |
| 2nd Author's Affiliation | Department of Quantum Engineering, Nagoya University |
| 3rd Author's Name | Chikaze MARUYAMA |
| 3rd Author's Affiliation | Department of Quantum Engineering, Nagoya University |
| 4th Author's Name | Hiroyuki AKAIKE |
| 4th Author's Affiliation | Department of Quantum Engineering, Nagoya University |
| 5th Author's Name | Akira FUJIMAKI |
| 5th Author's Affiliation | Department of Quantum Engineering, Nagoya University |
| Date | 2010-10-19 |
| Paper # | SCE2010-26 |
| Volume (vol) | vol.110 |
| Number (no) | 235 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |