| Presentation | 2010-08-27 Fabrication of Low-Electrical-Interference MEMS Mirror Array for Wavelength-selective Switches Tomomi SAKATA, Mitsuo USUI, Shingo UCHIYAMA, MATSUURA Tohru /, Hiromu ISHII, Fusao SHIMOKAWA, Yasuhiro SATO, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper describes the fabrication of a MEMS mirror array with low electrical interference in a wavelength-selective switch (WSS). A MEMS mirror array chip is fabricated with 100% yield by encapsulating the mirrors with an organic film that protect them from process damage. A mirror-drive electrode chip has high-aspect-ratio electrical isolation walls in the narrow space between adjacent mirror-drive electrodes by using thick-multilevel interconnection technology. Shield caps are made by anisotropic etching of Si(111). Because of the electrical isolation effect of the walls and caps, each MEMS mirror operates with low electrical interference. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Wavelength-selective Switch / WSS / MEMS / Electrical Interference |
| Paper # | EMD2010-44,CPM2010-60,OPE2010-69,LQE2010-42 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 2010/8/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of Low-Electrical-Interference MEMS Mirror Array for Wavelength-selective Switches |
| Sub Title (in English) | |
| Keyword(1) | Wavelength-selective Switch |
| Keyword(2) | WSS |
| Keyword(3) | MEMS |
| Keyword(4) | Electrical Interference |
| 1st Author's Name | Tomomi SAKATA |
| 1st Author's Affiliation | NTT Corporation() |
| 2nd Author's Name | Mitsuo USUI |
| 2nd Author's Affiliation | NTT Corporation |
| 3rd Author's Name | Shingo UCHIYAMA |
| 3rd Author's Affiliation | NTT Corporation |
| 4th Author's Name | MATSUURA Tohru / |
| 4th Author's Affiliation | / NTT Corporation |
| 5th Author's Name | Hiromu ISHII |
| 5th Author's Affiliation | NTT Corporation:Toyohashi University of Technology |
| 6th Author's Name | Fusao SHIMOKAWA |
| 6th Author's Affiliation | NTT Corporation:Kagawa University |
| 7th Author's Name | Yasuhiro SATO |
| 7th Author's Affiliation | NTT Corporation |
| Date | 2010-08-27 |
| Paper # | EMD2010-44,CPM2010-60,OPE2010-69,LQE2010-42 |
| Volume (vol) | vol.110 |
| Number (no) | 178 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |