| Presentation | 2010-08-26 III-V CMOS platform technologies for high-performance electric-photonic integrated circuits Mitsuru TAKENAKA, Masafumi YOKOYAMA, Masakazu SUGIYAMA, Yoshiaki NAKANO, Shinichi TAKAGI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We propose the III-V CMOS photonics platform which can monolithically integrate ultracompact III-V photonics and high-performance III-V CMOS transistors by using the III-V-on-Insulator (III-V-OI) substrate. The III-V-OI substrate was fabricated by direct wafer bonding of an InGaAsP/InP wafer to a thermally oxidized Si wafer. The InGaAsP ultrahigh index contrast photonic wire waveguide allowed the miniaturization of the III-V photonics, thus we have successfully demonstrated the loss-less ultrasmall bend waveguide with the bending radius of 5 μm. The ultrasmall arrayed waveguide grating (AWG) has also been demonstrated, and the reduction of the 4 channel AWG size with 600-GHz channel spacing down to be 147×92 μm^2 was achieved. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | CMOS photonics / electro-photonic integrated circuit / III-V-on-Insulator / Wafer bonding |
| Paper # | EMD2010-35,CPM2010-51,OPE2010-60,LQE2010-33 |
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| Committee | EMD |
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| Conference Date | 2010/8/19(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | III-V CMOS platform technologies for high-performance electric-photonic integrated circuits |
| Sub Title (in English) | |
| Keyword(1) | CMOS photonics |
| Keyword(2) | electro-photonic integrated circuit |
| Keyword(3) | III-V-on-Insulator |
| Keyword(4) | Wafer bonding |
| 1st Author's Name | Mitsuru TAKENAKA |
| 1st Author's Affiliation | Department of Electrical Engineering and Information Systems, The University of Tokyo() |
| 2nd Author's Name | Masafumi YOKOYAMA |
| 2nd Author's Affiliation | Department of Electrical Engineering and Information Systems, The University of Tokyo |
| 3rd Author's Name | Masakazu SUGIYAMA |
| 3rd Author's Affiliation | Department of Electrical Engineering and Information Systems, The University of Tokyo |
| 4th Author's Name | Yoshiaki NAKANO |
| 4th Author's Affiliation | Department of Electrical Engineering and Information Systems, The University of Tokyo |
| 5th Author's Name | Shinichi TAKAGI |
| 5th Author's Affiliation | Department of Electrical Engineering and Information Systems, The University of Tokyo |
| Date | 2010-08-26 |
| Paper # | EMD2010-35,CPM2010-51,OPE2010-60,LQE2010-33 |
| Volume (vol) | vol.110 |
| Number (no) | 178 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |