Presentation 2010-08-26
Precise High Temperature Sensor using β-phase Quartz
Takehiko UNO, Satoru NOGE,
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Abstract(in English) Quartz has been widely used for resonators and filters because of its excellent electromechanical characteristics. Quartz has a transition temperature, Tc, at 573℃. The electromechanical characteristics of quartz have been well investigated for α-phase(below Tc), however the characteristics in β-phase have not been well clarified. We investigated the piezoelectric properties of β-quartz plates from 573℃ to about 1,300℃. Clear piezoelectric resonances with high quality factors were observed. By using the large frequency temperature coe cient, β-phase quartz can be applicable to temperature sensors in high temperature region above 600℃. We proposed also an unwired set-up using the β-phase quartz temperature sensor.
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Keyword(in English) β-phase quartz / high-temperature / temperature sensor / piezoelectricity
Paper # EMD2010-30,CPM2010-46,OPE2010-55,LQE2010-28
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Committee EMD
Conference Date 2010/8/19(1days)
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Registration To Electromechanical Devices (EMD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Precise High Temperature Sensor using β-phase Quartz
Sub Title (in English)
Keyword(1) β-phase quartz
Keyword(2) high-temperature
Keyword(3) temperature sensor
Keyword(4) piezoelectricity
1st Author's Name Takehiko UNO
1st Author's Affiliation Faculty of Engineering, Kanagawa Inst. Tech.()
2nd Author's Name Satoru NOGE
2nd Author's Affiliation Dept. Electrical & Electronic Eng. Numazu Nation. College of Tech.
Date 2010-08-26
Paper # EMD2010-30,CPM2010-46,OPE2010-55,LQE2010-28
Volume (vol) vol.110
Number (no) 178
Page pp.pp.-
#Pages 6
Date of Issue