| Presentation | 2010/8/19 Development of MEMS Technologies for Micro Energy Systems Yuji SUZUKI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Power MEMS is defined as MEMS device related to energy conversion in micro scale. After the investigation of coin-sized gas turbine engines at MIT, various attempts have been made toward high-added-value mobile energy sources. Recently, energy harvesting, in which a small amount of electrical energy is extracted from thin energy existing in the environment, attracts much attention. In this report, recent development of MEMS technologies for micro energy systems is discussed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | PowerMEMS / Energy Harvesting / Thermophotovoltaic / Vibration-driven power generation / Electret |
| Paper # | ICD2010-51,SDM2010-136 |
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| Conference Information | |
| Committee | ICD |
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| Conference Date | 2010/8/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of MEMS Technologies for Micro Energy Systems |
| Sub Title (in English) | |
| Keyword(1) | PowerMEMS |
| Keyword(2) | Energy Harvesting |
| Keyword(3) | Thermophotovoltaic |
| Keyword(4) | Vibration-driven power generation |
| Keyword(5) | Electret |
| 1st Author's Name | Yuji SUZUKI |
| 1st Author's Affiliation | Graduate School of Engineering, The University of Tokyo() |
| Date | 2010/8/19 |
| Paper # | ICD2010-51,SDM2010-136 |
| Volume (vol) | vol.110 |
| Number (no) | 183 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |