Presentation 2010-05-28
FEM Analysis of Optical Waveguide Switch based on MEMS Directional Coupler
Makoto INAMOTO, Takeo MARUYAMA, Koichi IIYAMA,
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Abstract(in English) Silicon thermo-optic switches have a problem of high power consumption. We proposed the novel SOI optical waveguide switch based on MEMS directional coupler for low power consumption. We simulated the static characteristics of this device using finite element method (FEM). High extinction ratio of 30 dB at 4.5 V was obtained by the simulation.
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Keyword(in English) Optical switch / Micro-electro mechanical systems(MEMS) / Si wire waveguide / Directional coupler
Paper # LQE2010-8
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Conference Information
Committee LQE
Conference Date 2010/5/21(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) FEM Analysis of Optical Waveguide Switch based on MEMS Directional Coupler
Sub Title (in English)
Keyword(1) Optical switch
Keyword(2) Micro-electro mechanical systems(MEMS)
Keyword(3) Si wire waveguide
Keyword(4) Directional coupler
1st Author's Name Makoto INAMOTO
1st Author's Affiliation Graduate School of Natural Science and Technology, Kanazawa University()
2nd Author's Name Takeo MARUYAMA
2nd Author's Affiliation Graduate School of Natural Science and Technology, Kanazawa University
3rd Author's Name Koichi IIYAMA
3rd Author's Affiliation Graduate School of Natural Science and Technology, Kanazawa University
Date 2010-05-28
Paper # LQE2010-8
Volume (vol) vol.110
Number (no) 66
Page pp.pp.-
#Pages 4
Date of Issue