| Presentation | 2010-04-23 Characterization of Sputtered-Si Films for Photo-Sensor Diodes Jean de Dieu Mugiraneza, Tomoyuki Miyahira, Akinori Sakamoto, Takashi Noguchi, Ching-Ping Chiu, Meng-Hsin Chen, Wen-Chang Yeh, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Integration of thin film photo sensor diodes along with driving TFTs on display is promising to realize added-value displays. In this paper, we investigate optical and structural properties of Si Thin films deposited on glass by sputtering methods and annealed by Rapid Thermal Annealing (RTA). Aluminum electrodes are evaporated to fabricate a simple photosensitive device and electrical characteristics are evaluated. After annealing above 750℃, a-Si film changes in to micro poly-Si. Remarkable of photoconductivity is observed after hydrogenation in a-Si films and photocurrent slightly increases in crystallized films. After optimizing deposition and hydrogenation conditions, these films have potential application in photo-sensor diodes for futuristic System on Glass (SoG). |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | photo-sensor diode / sputtering / rapid thermal anneal(RTA) / system on glass(SoG) / Si film / TFT |
| Paper # | SDM2010-8,OME2010-8 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2010/4/16(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characterization of Sputtered-Si Films for Photo-Sensor Diodes |
| Sub Title (in English) | |
| Keyword(1) | photo-sensor diode |
| Keyword(2) | sputtering |
| Keyword(3) | rapid thermal anneal(RTA) |
| Keyword(4) | system on glass(SoG) |
| Keyword(5) | Si film |
| Keyword(6) | TFT |
| 1st Author's Name | Jean de Dieu Mugiraneza |
| 1st Author's Affiliation | Faculty of engineering, University of the Ryukyus() |
| 2nd Author's Name | Tomoyuki Miyahira |
| 2nd Author's Affiliation | Faculty of engineering, University of the Ryukyus |
| 3rd Author's Name | Akinori Sakamoto |
| 3rd Author's Affiliation | Faculty of engineering, University of the Ryukyus |
| 4th Author's Name | Takashi Noguchi |
| 4th Author's Affiliation | Faculty of engineering, University of the Ryukyus |
| 5th Author's Name | Ching-Ping Chiu |
| 5th Author's Affiliation | NTUST Taiwan |
| 6th Author's Name | Meng-Hsin Chen |
| 6th Author's Affiliation | NTUST Taiwan |
| 7th Author's Name | Wen-Chang Yeh |
| 7th Author's Affiliation | NTUST Taiwan |
| Date | 2010-04-23 |
| Paper # | SDM2010-8,OME2010-8 |
| Volume (vol) | vol.110 |
| Number (no) | 16 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |