| Presentation | 2010-05-14 Preparation and evaluation of Ga_2O_3 oxygen sensors Shinya KAYANO, Naoya YAMAGUCHI, Masaaki ISAI, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Recentry, from a point of environmental problems, oxygen gas sensors attract attention of controlling the exhaust gas. The Ga_2O_3 has an oxygen detection characteristic at more than 900℃, so this material ttracts much attention as an oxygen sensor at high temperature. The β-Ga_2O_3 films were prepared by the RF magnetron sputtering method. The effect of Ar:O_2 flow ratio, RF power, and thickness of films on the crystal and oxygen sensing properties were investigated. As a result, the superior crystal properties were obtained at the Ar:O_2 flow ratio of 5:1. It was found that the oxygen sensitivity depended on a film thickness. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Gallium oxide / Metal oxides / Magnetron sputtering method / Rapid thermal annealing (RTA) / Oxygen sensor |
| Paper # | ED2010-27,CPM2010-17,SDM2010-27 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
|---|---|
| Conference Date | 2010/5/6(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation and evaluation of Ga_2O_3 oxygen sensors |
| Sub Title (in English) | |
| Keyword(1) | Gallium oxide |
| Keyword(2) | Metal oxides |
| Keyword(3) | Magnetron sputtering method |
| Keyword(4) | Rapid thermal annealing (RTA) |
| Keyword(5) | Oxygen sensor |
| 1st Author's Name | Shinya KAYANO |
| 1st Author's Affiliation | Graduate School of Engineering, Shizuoka University() |
| 2nd Author's Name | Naoya YAMAGUCHI |
| 2nd Author's Affiliation | Faculty of Engineering, Shizuoka University |
| 3rd Author's Name | Masaaki ISAI |
| 3rd Author's Affiliation | Faculty of Engineering, Shizuoka University |
| Date | 2010-05-14 |
| Paper # | ED2010-27,CPM2010-17,SDM2010-27 |
| Volume (vol) | vol.110 |
| Number (no) | 31 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |