| Presentation | 2010-02-23 CMOS inverter based on carbon nanotube field-effect transistors with SiNx passivation films Takaomi KISHIMOTO, Yasuhide OHNO, Kenzo MAEHASHI, Koichi INOUE, Kazuhiko MATSUMOTO, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have demonstrated logic gates based on complementary carbon nanotube field-effect transistors(CNT-FETs)with SiN_x passivation films deposited by catalytic chemical vapor deposition. Carrier types in CNT-FETs were controlled by forming SiN_x passivation film. Electrical measurements reveal that the p-type characteristics of CNT-FETs were converted to n-type after deposition of SiN_x passivation films. Then, the n-type CNT-FETs with SiN_x passivation films were reconverted to p-type by annealing in N_2 atmosphere. As a consequence, the complementary voltage inverters comprising the p-type and n-type CNT-FETs with SiN_x passivation film were demonstrated on the same SiO_2 substrate by conventional photolithography and lift-off techniques. Moreover, static transfer and dynamic characteristics in the CNT-FET-based inverters were investigated, indicating that the gain of approximately three was achieved and that the device was switched properly at frequencies up to 100 Hz. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Carbon nanotube / Field-Effect Transistor / CMOS inverter / Cat-CVD |
| Paper # | ED2009-206,SDM2009-203 |
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| Committee | ED |
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| Conference Date | 2010/2/15(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | CMOS inverter based on carbon nanotube field-effect transistors with SiNx passivation films |
| Sub Title (in English) | |
| Keyword(1) | Carbon nanotube |
| Keyword(2) | Field-Effect Transistor |
| Keyword(3) | CMOS inverter |
| Keyword(4) | Cat-CVD |
| 1st Author's Name | Takaomi KISHIMOTO |
| 1st Author's Affiliation | The institute of scientific and industrial research, Osaka University() |
| 2nd Author's Name | Yasuhide OHNO |
| 2nd Author's Affiliation | The institute of scientific and industrial research, Osaka University |
| 3rd Author's Name | Kenzo MAEHASHI |
| 3rd Author's Affiliation | The institute of scientific and industrial research, Osaka University |
| 4th Author's Name | Koichi INOUE |
| 4th Author's Affiliation | The institute of scientific and industrial research, Osaka University |
| 5th Author's Name | Kazuhiko MATSUMOTO |
| 5th Author's Affiliation | The institute of scientific and industrial research, Osaka University |
| Date | 2010-02-23 |
| Paper # | ED2009-206,SDM2009-203 |
| Volume (vol) | vol.109 |
| Number (no) | 422 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |