Presentation 2010-01-14
Analysis of Transient Response of HfO_2/AlGaN/GaN MOSFETs
Yoshihisa HAYASHI, Shigeru KISHIMOTO, Takashi MIZUTANI,
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Abstract(in English) Analysis of transient response of HfO_2/AlGaN/GaN MOSFETs was performed by using the two-dimensional device simulation to investigate the effect of interface traps at the HfO_2/AlGaN interface. In experiment, the threshold voltage shifted toward the positive direction after the positive gate bias stress. The amount of threshold voltage shift was dependent on waiting time after the gate bias stress. The simulation results assuming three trap levels of E_C-E_T=0.4, 0.765, 1.65 eV which were obtained based on the analytical consideration of this experimental result explained the experimental results well. The shallow traps at E_C-E_T= 0.4 eV caused the g_m decrease at large V_ and the deep traps at E_C-E_T=0.765, 1.65 eV caused threshold voltage shift after the bias stress.
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Keyword(in English) HfO_2/AlGaN/GaN MOSFET / device simulation / interface trap / transient response
Paper # ED2009-186,MW2009-169
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Committee ED
Conference Date 2010/1/6(1days)
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Language JPN
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Title (in English) Analysis of Transient Response of HfO_2/AlGaN/GaN MOSFETs
Sub Title (in English)
Keyword(1) HfO_2/AlGaN/GaN MOSFET
Keyword(2) device simulation
Keyword(3) interface trap
Keyword(4) transient response
1st Author's Name Yoshihisa HAYASHI
1st Author's Affiliation Department of Quantum Engineering, Nagoya University()
2nd Author's Name Shigeru KISHIMOTO
2nd Author's Affiliation Department of Quantum Engineering, Nagoya University
3rd Author's Name Takashi MIZUTANI
3rd Author's Affiliation Department of Quantum Engineering, Nagoya University
Date 2010-01-14
Paper # ED2009-186,MW2009-169
Volume (vol) vol.109
Number (no) 360
Page pp.pp.-
#Pages 6
Date of Issue