Presentation 2010-04-23
Integrated RF MEMS Technology for Multiband RF Circuits
Kei Kuwabara, Kazuhiko Takagahara, Norio Sato, Yasuhiro Sato,
PDF Download Page PDF download Page Link
Abstract(in Japanese) (See Japanese page)
Abstract(in English) This paper describes integrated RF MEMS technology that enables integration of various kinds of RF MEMS devices and CMOS devices. RF MEMS switches that feature (1) CMOS-compatible process, (2) protection of movable parts for packaging with semiconductor packaging technology, (3) low-voltage operation for actuation by CMOS control circuits, are explained. Applications of the RF MEMS switches, such as switched inductor circuits and RF MEMS switch array with CMOS control circuits, are demonstrated.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) MEMS / CMOS / RF circuits / Switch / Inductor / Integration
Paper # SCE2010-8,MW2010-8
Date of Issue

Conference Information
Committee SCE
Conference Date 2010/4/16(1days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair
Vice Chair
Secretary
Assistant

Paper Information
Registration To Superconductive Electronics (SCE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Integrated RF MEMS Technology for Multiband RF Circuits
Sub Title (in English)
Keyword(1) MEMS
Keyword(2) CMOS
Keyword(3) RF circuits
Keyword(4) Switch
Keyword(5) Inductor
Keyword(6) Integration
1st Author's Name Kei Kuwabara
1st Author's Affiliation NTT Microsystem Laboratories()
2nd Author's Name Kazuhiko Takagahara
2nd Author's Affiliation NTT Microsystem Laboratories
3rd Author's Name Norio Sato
3rd Author's Affiliation NTT Microsystem Laboratories
4th Author's Name Yasuhiro Sato
4th Author's Affiliation NTT Microsystem Laboratories
Date 2010-04-23
Paper # SCE2010-8,MW2010-8
Volume (vol) vol.110
Number (no) 13
Page pp.pp.-
#Pages 5
Date of Issue