| Presentation | 2010-04-23 Integrated RF MEMS Technology for Multiband RF Circuits Kei Kuwabara, Kazuhiko Takagahara, Norio Sato, Yasuhiro Sato, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper describes integrated RF MEMS technology that enables integration of various kinds of RF MEMS devices and CMOS devices. RF MEMS switches that feature (1) CMOS-compatible process, (2) protection of movable parts for packaging with semiconductor packaging technology, (3) low-voltage operation for actuation by CMOS control circuits, are explained. Applications of the RF MEMS switches, such as switched inductor circuits and RF MEMS switch array with CMOS control circuits, are demonstrated. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MEMS / CMOS / RF circuits / Switch / Inductor / Integration |
| Paper # | SCE2010-8,MW2010-8 |
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| Conference Information | |
| Committee | SCE |
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| Conference Date | 2010/4/16(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Integrated RF MEMS Technology for Multiband RF Circuits |
| Sub Title (in English) | |
| Keyword(1) | MEMS |
| Keyword(2) | CMOS |
| Keyword(3) | RF circuits |
| Keyword(4) | Switch |
| Keyword(5) | Inductor |
| Keyword(6) | Integration |
| 1st Author's Name | Kei Kuwabara |
| 1st Author's Affiliation | NTT Microsystem Laboratories() |
| 2nd Author's Name | Kazuhiko Takagahara |
| 2nd Author's Affiliation | NTT Microsystem Laboratories |
| 3rd Author's Name | Norio Sato |
| 3rd Author's Affiliation | NTT Microsystem Laboratories |
| 4th Author's Name | Yasuhiro Sato |
| 4th Author's Affiliation | NTT Microsystem Laboratories |
| Date | 2010-04-23 |
| Paper # | SCE2010-8,MW2010-8 |
| Volume (vol) | vol.110 |
| Number (no) | 13 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |