| Presentation | 2010-05-27 Acoustic damping effect on capacitive micromachined ultrasonic transducer Seung-Mok Lee, Bu-Sang Cha, Masanori Okuyama, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Acoustic damping of a capacitive micromachined ultrasonic transducer in air makes a mechanical impedance in the membrane vibration, which plays an important role in the transformation efficiency of the device. We present the acoustic damping effect on the transformation efficiency of CMUT device, and those results are compared with the other factors such as capacitance variations originated from the change of air-hole rate (AR) in the total membrane area. Damping ratio of perforated membrane plate is computed under each condition, and the results of that are introduced to the calculation of membrane displacement using finite element method for the consideration of squeeze-film damping effect. Q factor and transformation efficiency of the CMUT device under the various AR of the membrane and device dimension conditions are studied, and the acoustic damping effect is discussed for the design optimization of that. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | CMUT / Damping / Transformation efficiency |
| Paper # | EA2010-15,SIP2010-15,SP2010-15 |
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| Conference Information | |
| Committee | SIP |
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| Conference Date | 2010/5/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Signal Processing (SIP) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Acoustic damping effect on capacitive micromachined ultrasonic transducer |
| Sub Title (in English) | |
| Keyword(1) | CMUT |
| Keyword(2) | Damping |
| Keyword(3) | Transformation efficiency |
| 1st Author's Name | Seung-Mok Lee |
| 1st Author's Affiliation | Ingen MSL Inc.() |
| 2nd Author's Name | Bu-Sang Cha |
| 2nd Author's Affiliation | Graduate School of Engineering Science, Osaka University |
| 3rd Author's Name | Masanori Okuyama |
| 3rd Author's Affiliation | Graduate School of Engineering Science, Osaka University |
| Date | 2010-05-27 |
| Paper # | EA2010-15,SIP2010-15,SP2010-15 |
| Volume (vol) | vol.110 |
| Number (no) | 55 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |