| Presentation | 2010-06-25 Oxygen partial pressure dependences of electrical and optical properties of Al-doped ZnO thin films grown by gas flow sputtering at a low temperature Takayoshi Sudo, Hirokuni Kondo, Hiroshi Sakuma, Kiyoshi Ishii, Keisuke Aramaki, KyungSung Yun, Hirofumi Kondo, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Al-doped ZnO (AZO) thin films were prepared at room temperature by gas flow sputtering (GFS) method using Al-Zn alloy targets. We evaluated the influence of O_2 gas flow rate and investigated the optical and electrical properties of AZO thin films. From the results, it was found that the deposition rates were obtained above 40nm/min and the resistivity decreased by reducing the flow rate of oxygen gas. We could obtain AZO thin films with the low resistivity as low as 1.2×10-3 Ωcm with transmittance above 90% in the visible region under the oxygen partial pressure of 2.6×10-4 Pa. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Al-doped ZnO film / Transparent conductive film / Sputtered ZnO film / Gas flow sputtering |
| Paper # | EMD2010-13,CPM2010-27,OME2010-32 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 2010/6/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Chair | |
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| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Oxygen partial pressure dependences of electrical and optical properties of Al-doped ZnO thin films grown by gas flow sputtering at a low temperature |
| Sub Title (in English) | |
| Keyword(1) | Al-doped ZnO film |
| Keyword(2) | Transparent conductive film |
| Keyword(3) | Sputtered ZnO film |
| Keyword(4) | Gas flow sputtering |
| 1st Author's Name | Takayoshi Sudo |
| 1st Author's Affiliation | Department of Electrical and Electronic System Engineering, Graduate School of Utsunomiya University() |
| 2nd Author's Name | Hirokuni Kondo |
| 2nd Author's Affiliation | Department of Electrical and Electronic System Engineering, Graduate School of Utsunomiya University |
| 3rd Author's Name | Hiroshi Sakuma |
| 3rd Author's Affiliation | Department of Electrical and Electronic System Engineering, Graduate School of Utsunomiya University |
| 4th Author's Name | Kiyoshi Ishii |
| 4th Author's Affiliation | Department of Electrical and Electronic System Engineering, Graduate School of Utsunomiya University |
| 5th Author's Name | Keisuke Aramaki |
| 5th Author's Affiliation | Sony Chemical & Information Device Corporation |
| 6th Author's Name | KyungSung Yun |
| 6th Author's Affiliation | Sony Chemical & Information Device Corporation |
| 7th Author's Name | Hirofumi Kondo |
| 7th Author's Affiliation | Sony Chemical & Information Device Corporation |
| Date | 2010-06-25 |
| Paper # | EMD2010-13,CPM2010-27,OME2010-32 |
| Volume (vol) | vol.110 |
| Number (no) | 99 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |