Presentation 2010-06-30
A design of Novel IGBT with Oblique Trench Gate(Session 3A : Emerging Device Technology 2)
Juhyun Oh, Dae Hwan Chun, Eui Bok Lee, Young Hwan Kim, Chun Keun Kim, Byeong Kwon Ju, Man Young Sung, Yong Tae Kim,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) In this paper, a new IGBT structure that has oblique trench gate is proposed. This oblique trench gate IGBT(OTIGBT) has higher breakdown voltage and lower on-state voltage drop characteristic than conventional IGBT. The proposed OTIGBT distributes the electric field which is concentrated at the trench edge to the curve of the p-base region. Moreover, this proposed structure can reduce the on-state voltage drop due to the reduced JFET area that is existed in the planar gate IGBT structure. Simulation results indicate the breakdown voltage of the OTIGBT is increased compared to the trench gate IGBT. The on-state voltage drop is reduced than planar gate IGBT which is similar to the on-state voltage drop of trench gate IGBT.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Trench IGBT / Breakdown voltage / Electric field distribution
Paper # ED2010-64,SDM2010-65
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Committee ED
Conference Date 2010/6/23(1days)
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Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) A design of Novel IGBT with Oblique Trench Gate(Session 3A : Emerging Device Technology 2)
Sub Title (in English)
Keyword(1) Trench IGBT
Keyword(2) Breakdown voltage
Keyword(3) Electric field distribution
1st Author's Name Juhyun Oh
1st Author's Affiliation School of Electrical Engineering, Korea University()
2nd Author's Name Dae Hwan Chun
2nd Author's Affiliation School of Electrical Engineering, Korea University
3rd Author's Name Eui Bok Lee
3rd Author's Affiliation School of Electrical Engineering, Korea University:Semiconductor Materials and Devices Lab, Korea Institute of Science and Technology
4th Author's Name Young Hwan Kim
4th Author's Affiliation Semiconductor Materials and Devices Lab, Korea Institute of Science and Technology
5th Author's Name Chun Keun Kim
5th Author's Affiliation Semiconductor Materials and Devices Lab, Korea Institute of Science and Technology
6th Author's Name Byeong Kwon Ju
6th Author's Affiliation Semiconductor Materials and Devices Lab, Korea Institute of Science and Technology
7th Author's Name Man Young Sung
7th Author's Affiliation Semiconductor Materials and Devices Lab, Korea Institute of Science and Technology
8th Author's Name Yong Tae Kim
8th Author's Affiliation Semiconductor Materials and Devices Lab, Korea Institute of Science and Technology
Date 2010-06-30
Paper # ED2010-64,SDM2010-65
Volume (vol) vol.110
Number (no) 109
Page pp.pp.-
#Pages 3
Date of Issue