| Presentation | 2009-12-04 Analysis of Layout Structure Dependency on Distance/Space Variation for MOS Transistors Yuichi SADOHIRA, Shigetoshi NAKATAKE, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this paper, we investigate the dependency of layout structures such as diffusion sharing/isolation and gate division on MOS transistor characteristics against the variation caused by manufacturing. We developed TEG chips on 90nm manufacturing process and evaluated them for the investigation. Each chip is composed of 7×7 units, various sizes and layouts of MOS transistors are embedded in each of units. We measured Vth of each transistors and analyzed them. In the analysis, we identified the space-dependent components and distance-dependent components from the variation values of the measured Vth. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MOS Transistor / Manufacturing Variation / Distance-Dependent Variation / Space-Dependent Variation / Layout-Structure-Dependency |
| Paper # | VLD2009-61,DC2009-48 |
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| Conference Information | |
| Committee | DC |
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| Conference Date | 2009/11/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Dependable Computing (DC) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Analysis of Layout Structure Dependency on Distance/Space Variation for MOS Transistors |
| Sub Title (in English) | |
| Keyword(1) | MOS Transistor |
| Keyword(2) | Manufacturing Variation |
| Keyword(3) | Distance-Dependent Variation |
| Keyword(4) | Space-Dependent Variation |
| Keyword(5) | Layout-Structure-Dependency |
| 1st Author's Name | Yuichi SADOHIRA |
| 1st Author's Affiliation | School of Environmental Engineering, The University of Kitakyushu() |
| 2nd Author's Name | Shigetoshi NAKATAKE |
| 2nd Author's Affiliation | School of Environmental Engineering, The University of Kitakyushu |
| Date | 2009-12-04 |
| Paper # | VLD2009-61,DC2009-48 |
| Volume (vol) | vol.109 |
| Number (no) | 316 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |