Presentation | 2009-11-19 High Efficiency ultraviolet emitters by activation annealing in oxygen flow Kengo NAGATA, Tomoki ICHIKAWA, Kenichiro TAKEDA, Kentaro NAGAMATSU, Motoaki IWAYA, Satoshi KAMIYAMA, Hiroshi AMANO, Isamu AKASAKI, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Activation annealing of Mg-doped p-type Al_<0.17>Ga_<0.83>N in different gases was conducted. The hole concentration in Al_<0.17>Ga_<0.83>N annealed in oxygen flow is higher than those annealed in nitrogen or air. A hole concentration of 1.3×10^<16>cm^<-3> at room temperature was achieved by annealing in oxygen flow at 900℃. We also confirmed the effect of activation annealing in oxygen flow on the performance of UV LED. At a DC current of 100mA, the output power of the LED annealed in oxygen flow at 900℃ is 4 times higher than that of the LED annealed in nitrogen flow at 800℃. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | activation annealing / hydrogen desorption / oxygen / hole concentration / UV LED |
Paper # | ED2009-144,CPM2009-118,LQE2009-123 |
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Conference Information | |
Committee | LQE |
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Conference Date | 2009/11/12(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | High Efficiency ultraviolet emitters by activation annealing in oxygen flow |
Sub Title (in English) | |
Keyword(1) | activation annealing |
Keyword(2) | hydrogen desorption |
Keyword(3) | oxygen |
Keyword(4) | hole concentration |
Keyword(5) | UV LED |
1st Author's Name | Kengo NAGATA |
1st Author's Affiliation | Faculty of Science and Technology, Meijo University() |
2nd Author's Name | Tomoki ICHIKAWA |
2nd Author's Affiliation | Faculty of Science and Technology, Meijo University |
3rd Author's Name | Kenichiro TAKEDA |
3rd Author's Affiliation | Faculty of Science and Technology, Meijo University |
4th Author's Name | Kentaro NAGAMATSU |
4th Author's Affiliation | Faculty of Science and Technology, Meijo University |
5th Author's Name | Motoaki IWAYA |
5th Author's Affiliation | Faculty of Science and Technology, Meijo University |
6th Author's Name | Satoshi KAMIYAMA |
6th Author's Affiliation | Faculty of Science and Technology, Meijo University |
7th Author's Name | Hiroshi AMANO |
7th Author's Affiliation | Faculty of Science and Technology, Meijo University |
8th Author's Name | Isamu AKASAKI |
8th Author's Affiliation | Faculty of Science and Technology, Meijo University |
Date | 2009-11-19 |
Paper # | ED2009-144,CPM2009-118,LQE2009-123 |
Volume (vol) | vol.109 |
Number (no) | 290 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |