Presentation 2009-11-19
High Efficiency ultraviolet emitters by activation annealing in oxygen flow
Kengo NAGATA, Tomoki ICHIKAWA, Kenichiro TAKEDA, Kentaro NAGAMATSU, Motoaki IWAYA, Satoshi KAMIYAMA, Hiroshi AMANO, Isamu AKASAKI,
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Abstract(in English) Activation annealing of Mg-doped p-type Al_<0.17>Ga_<0.83>N in different gases was conducted. The hole concentration in Al_<0.17>Ga_<0.83>N annealed in oxygen flow is higher than those annealed in nitrogen or air. A hole concentration of 1.3×10^<16>cm^<-3> at room temperature was achieved by annealing in oxygen flow at 900℃. We also confirmed the effect of activation annealing in oxygen flow on the performance of UV LED. At a DC current of 100mA, the output power of the LED annealed in oxygen flow at 900℃ is 4 times higher than that of the LED annealed in nitrogen flow at 800℃.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) activation annealing / hydrogen desorption / oxygen / hole concentration / UV LED
Paper # ED2009-144,CPM2009-118,LQE2009-123
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Conference Information
Committee LQE
Conference Date 2009/11/12(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) High Efficiency ultraviolet emitters by activation annealing in oxygen flow
Sub Title (in English)
Keyword(1) activation annealing
Keyword(2) hydrogen desorption
Keyword(3) oxygen
Keyword(4) hole concentration
Keyword(5) UV LED
1st Author's Name Kengo NAGATA
1st Author's Affiliation Faculty of Science and Technology, Meijo University()
2nd Author's Name Tomoki ICHIKAWA
2nd Author's Affiliation Faculty of Science and Technology, Meijo University
3rd Author's Name Kenichiro TAKEDA
3rd Author's Affiliation Faculty of Science and Technology, Meijo University
4th Author's Name Kentaro NAGAMATSU
4th Author's Affiliation Faculty of Science and Technology, Meijo University
5th Author's Name Motoaki IWAYA
5th Author's Affiliation Faculty of Science and Technology, Meijo University
6th Author's Name Satoshi KAMIYAMA
6th Author's Affiliation Faculty of Science and Technology, Meijo University
7th Author's Name Hiroshi AMANO
7th Author's Affiliation Faculty of Science and Technology, Meijo University
8th Author's Name Isamu AKASAKI
8th Author's Affiliation Faculty of Science and Technology, Meijo University
Date 2009-11-19
Paper # ED2009-144,CPM2009-118,LQE2009-123
Volume (vol) vol.109
Number (no) 290
Page pp.pp.-
#Pages 6
Date of Issue