Presentation 2009-11-19
Thermodynamic aspects of the raised pressure MOVPE for growth of GaInN
Kensuke NAGATA, Daisuke IIDA, Kentaro NAGAMATSU, Kenichiro TAKEDA, Tetsuya MATSUBARA, Motoaki IWAYA, Satoshi KAMIYAMA, Hiroshi AMANO, Isamu AKASAKI,
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Abstract(in English) High In content GaInN films are promising for many applications such as multi-junction tandem photovoltaic cells, high power heterostructured field-effect transistors, high-brightness green light-emitting diodes, etc. Up to now, growth temperature for high In composition GaInN films should be lower than that of GaN. It is desirable to grow GaInN at higher temperature to achieve high quality and low residual impurities. It is possible to grow GaInN at higher temperature under higher pressure. This paper reports GaInN growth at raised pressure by MOVPE and these thermodynamic aspects.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) GaInN / MOVPE / raised pressure / pressurize / thermodynamic / In composition / pressure
Paper # ED2009-140,CPM2009-114,LQE2009-119
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Committee LQE
Conference Date 2009/11/12(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Thermodynamic aspects of the raised pressure MOVPE for growth of GaInN
Sub Title (in English)
Keyword(1) GaInN
Keyword(2) MOVPE
Keyword(3) raised pressure
Keyword(4) pressurize
Keyword(5) thermodynamic
Keyword(6) In composition
Keyword(7) pressure
1st Author's Name Kensuke NAGATA
1st Author's Affiliation Faculty of Science and Technology, Meijo University()
2nd Author's Name Daisuke IIDA
2nd Author's Affiliation Faculty of Science and Technology, Meijo University
3rd Author's Name Kentaro NAGAMATSU
3rd Author's Affiliation Faculty of Science and Technology, Meijo University
4th Author's Name Kenichiro TAKEDA
4th Author's Affiliation Faculty of Science and Technology, Meijo University
5th Author's Name Tetsuya MATSUBARA
5th Author's Affiliation Faculty of Science and Technology, Meijo University
6th Author's Name Motoaki IWAYA
6th Author's Affiliation Faculty of Science and Technology, Meijo University
7th Author's Name Satoshi KAMIYAMA
7th Author's Affiliation Faculty of Science and Technology, Meijo University
8th Author's Name Hiroshi AMANO
8th Author's Affiliation Faculty of Science and Technology, Meijo University
9th Author's Name Isamu AKASAKI
9th Author's Affiliation Faculty of Science and Technology, Meijo University
Date 2009-11-19
Paper # ED2009-140,CPM2009-114,LQE2009-119
Volume (vol) vol.109
Number (no) 290
Page pp.pp.-
#Pages 4
Date of Issue