Presentation 2009-11-19
MBE growth of well-aligned InN crystals using Mo-mask selective area growth technique
Jumpei KAMIMURA, Katsumi KISHINO, Akihiko Kikuchi,
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Abstract(in English) We demonstrated selective-area growth of InN on Sapphire (0001) substrates by use of molybdenum-mask selective area growth (SAG) of rf-plasma-assisted molecular beam epitaxy (RF-MBE). The well-aligned selective-area grown InN crystals, which have a diameter of 1.0μm, a height of 1.5μm, and a pitch of 1.0μm, showed high crystalline-quality with the room-temperature (RT) photoluminescence (PL) FWHM of 54meV and the PL peak energy of 0.63eV. This suggests that we have grown high-quality InN crystals directly on sapphire substrates without using GaN templates or any buffer layers and also catalyst.
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Keyword(in English) InN / Selective-Area Growth / Molecular Beam Epitaxy / Sapphire (0001) substrate
Paper # ED2009-131,CPM2009-105,LQE2009-110
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Committee LQE
Conference Date 2009/11/12(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) MBE growth of well-aligned InN crystals using Mo-mask selective area growth technique
Sub Title (in English)
Keyword(1) InN
Keyword(2) Selective-Area Growth
Keyword(3) Molecular Beam Epitaxy
Keyword(4) Sapphire (0001) substrate
1st Author's Name Jumpei KAMIMURA
1st Author's Affiliation Faculty of Science and Technology, Sophia University:CREST, Japan Science and Technology Agency()
2nd Author's Name Katsumi KISHINO
2nd Author's Affiliation Faculty of Science and Technology, Sophia University:Sophia Nanotechnology Research Center:CREST, Japan Science and Technology Agency
3rd Author's Name Akihiko Kikuchi
3rd Author's Affiliation Faculty of Science and Technology, Sophia University:Sophia Nanotechnology Research Center:CREST, Japan Science and Technology Agency
Date 2009-11-19
Paper # ED2009-131,CPM2009-105,LQE2009-110
Volume (vol) vol.109
Number (no) 290
Page pp.pp.-
#Pages 4
Date of Issue