| Presentation | 2009-11-19 MOVPE growth and optical properties of AlGaN on AlN/sapphire Yuki SHIMAHARA, Hiroyuki TAKETOMI, Hideto MIYAKE, Kazumasa HIRAMATSU, Fumitsugu FUKUYO, Tomoyuki OKADA, Hidetsugu TAKAOKA, Harumasa YOSHIDA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We performed growth of AlGaN on AlN/sapphire substrate as an underlying layer by low-pressure MOVPE with in-situ monitoring system, in order to fabricate a further high-quality and well-thickness controlled film, and controlled the film thickness. The Al content in AlGaN can be controlled by the growth temperature. Ultraviolet light of luminescence with wavelength that corresponded by changing the Al content was observed. Moreover, we fabricate the prototype ultraviolet-light source tube with the AlGaN film as a target for the electronic beam excitation. Luminous intensity was significantly improved by Si-doping, and optimization of the growth condition, and 247nm deep-ultraviolet light was observed from the tube. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | LP-MOVPE / AlGaN / AlN / ultraviolet-light source |
| Paper # | ED2009-130,CPM2009-104,LQE2009-109 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2009/11/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | MOVPE growth and optical properties of AlGaN on AlN/sapphire |
| Sub Title (in English) | |
| Keyword(1) | LP-MOVPE |
| Keyword(2) | AlGaN |
| Keyword(3) | AlN |
| Keyword(4) | ultraviolet-light source |
| 1st Author's Name | Yuki SHIMAHARA |
| 1st Author's Affiliation | Faculty of Engineering, Mie University() |
| 2nd Author's Name | Hiroyuki TAKETOMI |
| 2nd Author's Affiliation | Faculty of Engineering, Mie University |
| 3rd Author's Name | Hideto MIYAKE |
| 3rd Author's Affiliation | Faculty of Engineering, Mie University |
| 4th Author's Name | Kazumasa HIRAMATSU |
| 4th Author's Affiliation | Faculty of Engineering, Mie University |
| 5th Author's Name | Fumitsugu FUKUYO |
| 5th Author's Affiliation | HAMAMATSU PHOTONICS K.K. |
| 6th Author's Name | Tomoyuki OKADA |
| 6th Author's Affiliation | HAMAMATSU PHOTONICS K.K. |
| 7th Author's Name | Hidetsugu TAKAOKA |
| 7th Author's Affiliation | HAMAMATSU PHOTONICS K.K. |
| 8th Author's Name | Harumasa YOSHIDA |
| 8th Author's Affiliation | HAMAMATSU PHOTONICS K.K. |
| Date | 2009-11-19 |
| Paper # | ED2009-130,CPM2009-104,LQE2009-109 |
| Volume (vol) | vol.109 |
| Number (no) | 290 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |