| Presentation | 2009-10-09 High-Density Recording in Mass-Productive Polycrystalline Ferroelectric Thin Film Media Kenjiro Fujimoto, Takahiro KAWANO, Atsushi ONOE, Masahiro TAMURA, Masaru UMEDA, Masayuki TODA, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We demonstrate very-high-density ferroelectric recording experiments of 1Tbit/in^2 in polycrystalline Pb(Zr,Ti) O_3 (PZT) thin film for the first time. A high-quality polycrystalline PZT thin film was successfully deposited on a silicon substrate with a SrRuO_3 (SRO) electrode by metal-organic chemical vapor deposition (MOCVD) technique. The roughness of the PZT film was reduced to less than 1nm by chemical mechanical polishing (CMP) method. The PZT film has a very high controllability for domain inversion. Our fabrication process also enables high productivity. Therefore, our PZT film has potential to be a mass-productive ferroelectric recording medium for high-density storage systems. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Ferroelectric thin film / high-density recording / recording medium |
| Paper # | MR2009-25 |
| Date of Issue |
| Conference Information | |
| Committee | MR |
|---|---|
| Conference Date | 2009/10/1(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Magnetic Recording (MR) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | High-Density Recording in Mass-Productive Polycrystalline Ferroelectric Thin Film Media |
| Sub Title (in English) | |
| Keyword(1) | Ferroelectric thin film |
| Keyword(2) | high-density recording |
| Keyword(3) | recording medium |
| 1st Author's Name | Kenjiro Fujimoto |
| 1st Author's Affiliation | Corporate R & D, Pioneer Corporation() |
| 2nd Author's Name | Takahiro KAWANO |
| 2nd Author's Affiliation | Corporate R & D, Pioneer Corporation |
| 3rd Author's Name | Atsushi ONOE |
| 3rd Author's Affiliation | Corporate R & D, Pioneer Corporation |
| 4th Author's Name | Masahiro TAMURA |
| 4th Author's Affiliation | AMAYA Corporation |
| 5th Author's Name | Masaru UMEDA |
| 5th Author's Affiliation | Wacom R & D Corporation |
| 6th Author's Name | Masayuki TODA |
| 6th Author's Affiliation | Wacom R & D Corporation |
| Date | 2009-10-09 |
| Paper # | MR2009-25 |
| Volume (vol) | vol.109 |
| Number (no) | 222 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |