Presentation | 2009-11-13 Effect of magnetic dot shape in BPM on magnetic and R/W performance with 1Tbit/in^2 regime Jun ARIAKE, Yuji KONDO, Shunji ISHIO, Naoki HONDA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Fine magnetic dot arrays with an areal density around 1Tbit/in^2 were fabricated for obtaining fabrication process issues and design parameter of bit patterned media (BPM). In dot size analysis, a size distribution of about 1nm of standard deviation existed. This distribution corresponds to about 5kOe in H_k distribution in BPM from a simulated result. In dot period analysis, a dispersion value of about 5% was found in both a scanning direction of EB exposure and a direction perpendicular to the scanning direction. Dot period dispersion must be reduced because it is proportional to switching field distribution (SFD) from a simulated result. Undulation analysis along an EB scanning direction in fine magnetic dots revealed that magnetostatic interaction can be occurred between dots in cross track direction. A very stable and accurate process is required for BPM fabrication at 1Tbit/in^2 and beyond. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | bit patterned media / fine magnetic dot array / Electron beam lithography / dot shape analysis / switching field distribution |
Paper # | MR2009-30 |
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Conference Information | |
Committee | MR |
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Conference Date | 2009/11/6(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Magnetic Recording (MR) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Effect of magnetic dot shape in BPM on magnetic and R/W performance with 1Tbit/in^2 regime |
Sub Title (in English) | |
Keyword(1) | bit patterned media |
Keyword(2) | fine magnetic dot array |
Keyword(3) | Electron beam lithography |
Keyword(4) | dot shape analysis |
Keyword(5) | switching field distribution |
1st Author's Name | Jun ARIAKE |
1st Author's Affiliation | AIT, Akita Prefectural R & D Center() |
2nd Author's Name | Yuji KONDO |
2nd Author's Affiliation | AIT, Akita Prefectural R & D Center |
3rd Author's Name | Shunji ISHIO |
3rd Author's Affiliation | Akita University |
4th Author's Name | Naoki HONDA |
4th Author's Affiliation | Tohoku Institute of technology |
Date | 2009-11-13 |
Paper # | MR2009-30 |
Volume (vol) | vol.109 |
Number (no) | 282 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |