Presentation 2009-11-13
Effect of magnetic dot shape in BPM on magnetic and R/W performance with 1Tbit/in^2 regime
Jun ARIAKE, Yuji KONDO, Shunji ISHIO, Naoki HONDA,
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Abstract(in English) Fine magnetic dot arrays with an areal density around 1Tbit/in^2 were fabricated for obtaining fabrication process issues and design parameter of bit patterned media (BPM). In dot size analysis, a size distribution of about 1nm of standard deviation existed. This distribution corresponds to about 5kOe in H_k distribution in BPM from a simulated result. In dot period analysis, a dispersion value of about 5% was found in both a scanning direction of EB exposure and a direction perpendicular to the scanning direction. Dot period dispersion must be reduced because it is proportional to switching field distribution (SFD) from a simulated result. Undulation analysis along an EB scanning direction in fine magnetic dots revealed that magnetostatic interaction can be occurred between dots in cross track direction. A very stable and accurate process is required for BPM fabrication at 1Tbit/in^2 and beyond.
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Keyword(in English) bit patterned media / fine magnetic dot array / Electron beam lithography / dot shape analysis / switching field distribution
Paper # MR2009-30
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Committee MR
Conference Date 2009/11/6(1days)
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Registration To Magnetic Recording (MR)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Effect of magnetic dot shape in BPM on magnetic and R/W performance with 1Tbit/in^2 regime
Sub Title (in English)
Keyword(1) bit patterned media
Keyword(2) fine magnetic dot array
Keyword(3) Electron beam lithography
Keyword(4) dot shape analysis
Keyword(5) switching field distribution
1st Author's Name Jun ARIAKE
1st Author's Affiliation AIT, Akita Prefectural R & D Center()
2nd Author's Name Yuji KONDO
2nd Author's Affiliation AIT, Akita Prefectural R & D Center
3rd Author's Name Shunji ISHIO
3rd Author's Affiliation Akita University
4th Author's Name Naoki HONDA
4th Author's Affiliation Tohoku Institute of technology
Date 2009-11-13
Paper # MR2009-30
Volume (vol) vol.109
Number (no) 282
Page pp.pp.-
#Pages 6
Date of Issue