Presentation | 2009-09-04 Evaluation of Ferromagnetic Thin Film RF Noise Suppressor applied to On-Chip Transmission Lines for the Purpose of Noise Suppression in Semiconductor Devices Sho Muroga, Yasushi Endo, Mitsuru Suzuki, Takayoshi Inagaki, Yoshio Mitsuzuka, Masahiro Yamaguchi, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | The noise suppression on the transmission line, fabricated in a 0.15μm five metals SOI-CMOS technology with high resistivity substrate, has been demonstrated using the CoZrNb soft magnetic film. The power loss of 37% was obtained at the frequency of 7GHz in coplanar line with film and 17% was obtained at the frequency of 5.4GHz in microstrip line with film. As a result, a large loss was obtained by short length of the transmission line. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Thin Film RF Noise Suppressor / Ferromagnetic Film / EMC |
Paper # | EMCJ2009-36 |
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Committee | EMCJ |
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Conference Date | 2009/8/28(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Electromagnetic Compatibility (EMCJ) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Evaluation of Ferromagnetic Thin Film RF Noise Suppressor applied to On-Chip Transmission Lines for the Purpose of Noise Suppression in Semiconductor Devices |
Sub Title (in English) | |
Keyword(1) | Thin Film RF Noise Suppressor |
Keyword(2) | Ferromagnetic Film |
Keyword(3) | EMC |
1st Author's Name | Sho Muroga |
1st Author's Affiliation | School of Engineering, Tohoku University() |
2nd Author's Name | Yasushi Endo |
2nd Author's Affiliation | School of Engineering, Tohoku University |
3rd Author's Name | Mitsuru Suzuki |
3rd Author's Affiliation | School of Engineering, Tohoku University |
4th Author's Name | Takayoshi Inagaki |
4th Author's Affiliation | School of Engineering, Tohoku University |
5th Author's Name | Yoshio Mitsuzuka |
5th Author's Affiliation | School of Engineering, Tohoku University |
6th Author's Name | Masahiro Yamaguchi |
6th Author's Affiliation | School of Engineering, Tohoku University |
Date | 2009-09-04 |
Paper # | EMCJ2009-36 |
Volume (vol) | vol.109 |
Number (no) | 185 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |