Presentation 2009-08-21
Light-emitting properties of Er-doped TaO_x thin films fabricated by using rf sputtering
Kenta MIURA, Kazusa KANO, Genjyo FUSEGI, Mayank SINGH, Osamu HANAIZUMI,
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Abstract(in English) Er-doped TaO_x films were prepared by using rf magnetron sputtering. Visible photoluminescence was obtained from the films after annealing under excitation with a He-Cd laser (λ=325nm). Two peaks having wavelengths around 550nm and 670nm were observed from the films annealed at 800-1100℃. The strongest intensity of the 550-nm (green) peak was obtained from the film with 0.96mol% of Er concentration after annealing at 900℃ for 20min. Such sputtered films which emit visible light can be useful as high-index materials for novel active devices using autocloned photonic crystals.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) TaO_x / Er / Sputtering / Annealing / Visible-light Emission
Paper # EMD2009-53,CPM2009-77,OPE2009-101,LQE2009-60
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Committee LQE
Conference Date 2009/8/13(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Light-emitting properties of Er-doped TaO_x thin films fabricated by using rf sputtering
Sub Title (in English)
Keyword(1) TaO_x
Keyword(2) Er
Keyword(3) Sputtering
Keyword(4) Annealing
Keyword(5) Visible-light Emission
1st Author's Name Kenta MIURA
1st Author's Affiliation Graduate School of Engineering, Gunma University()
2nd Author's Name Kazusa KANO
2nd Author's Affiliation Graduate School of Engineering, Gunma University
3rd Author's Name Genjyo FUSEGI
3rd Author's Affiliation Graduate School of Engineering, Gunma University
4th Author's Name Mayank SINGH
4th Author's Affiliation Graduate School of Engineering, Gunma University
5th Author's Name Osamu HANAIZUMI
5th Author's Affiliation Graduate School of Engineering, Gunma University
Date 2009-08-21
Paper # EMD2009-53,CPM2009-77,OPE2009-101,LQE2009-60
Volume (vol) vol.109
Number (no) 176
Page pp.pp.-
#Pages 4
Date of Issue