| Presentation | 2009-06-25 Sub-10nm Multi-Nano-Pillar Type Vertical MOSFET Tetsuo Endoh, Koji Sakui, Yukio Yasuda, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The excellent performance of 10nm gate Multi-Nano-Pillar type (M-) Vertical MOSFET has been numerically shown for the first time. It is made clear that M-Vertical MOSFET, in comparison with the conventional Single Pillar type (S-) Vertical MOSFET, achieve an increased driving current by more than 2 times, a nearly ideal S-factor, and a suppressed cutoff-leakage current by less than 1/60 by suppressing short channel effect and by suppressing the DIBL effect. Moreover, mechanisms of these improvements of the M-Vertical MOSFET are made clear. From all of the above, it is shown that M-Vertical MOSFET is a key device candidate for future high speed and low power LSI's in the sub- 10nm generation. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Vertical MOSFET / 3D structured Device / MOSFET / LSI |
| Paper # | ED2009-90,SDM2009-85 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2009/6/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Sub-10nm Multi-Nano-Pillar Type Vertical MOSFET |
| Sub Title (in English) | |
| Keyword(1) | Vertical MOSFET |
| Keyword(2) | 3D structured Device |
| Keyword(3) | MOSFET |
| Keyword(4) | LSI |
| 1st Author's Name | Tetsuo Endoh |
| 1st Author's Affiliation | Center for Interdisciplinary Research, TOHOKU UNIVERSITY:JST CREST() |
| 2nd Author's Name | Koji Sakui |
| 2nd Author's Affiliation | Center for Interdisciplinary Research, TOHOKU UNIVERSITY:JST CREST |
| 3rd Author's Name | Yukio Yasuda |
| 3rd Author's Affiliation | Center for Interdisciplinary Research, TOHOKU UNIVERSITY:JST CREST |
| Date | 2009-06-25 |
| Paper # | ED2009-90,SDM2009-85 |
| Volume (vol) | vol.109 |
| Number (no) | 98 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |