| Presentation | 2009-06-24 A Study on Lateral Surface Treatment of the CdTe X-ray image-sensor Jin Kwan Kim, Keedong Yang, Yong Soo Lee, Hee Chul Lee, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A CdTe X-ray sensor for dental X-ray imaging is fabricated and the effect of a lateral surface treatment is investigated. Due to non-uniform edge pixels in the CdTe X-ray sensor, the number of effective pixels that can be used for the final image is reduced, and a line defect is introduced when several sensors are put together for the target resolution. To improve the roughness of the lateral surface, a lateral surface polishing process is introduced. The polishing process reduces dead pixels by 76%, from 304 to 76. By lateral surface polishing, most of the dead pixels near the device edge become normal pixels. The non-uniform edge pixels are improved by the lateral surface treatment without affecting the central pixels of the CdTe X-ray image sensor. The effective resolution is extended to the edges of device; therefore, the entire area of the CdTe X-ray sensor can be used for the final image. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | CdTe / X-ray / Medical imaging sensor / Lateral surface / Surface treatment |
| Paper # | ED2009-69,SDM2009-64 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2009/6/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Study on Lateral Surface Treatment of the CdTe X-ray image-sensor |
| Sub Title (in English) | |
| Keyword(1) | CdTe |
| Keyword(2) | X-ray |
| Keyword(3) | Medical imaging sensor |
| Keyword(4) | Lateral surface |
| Keyword(5) | Surface treatment |
| 1st Author's Name | Jin Kwan Kim |
| 1st Author's Affiliation | Dept. of EECS, Korea Advanced Institute of Science and Technology() |
| 2nd Author's Name | Keedong Yang |
| 2nd Author's Affiliation | i3system Company |
| 3rd Author's Name | Yong Soo Lee |
| 3rd Author's Affiliation | Dept. of EECS, Korea Advanced Institute of Science and Technology |
| 4th Author's Name | Hee Chul Lee |
| 4th Author's Affiliation | Dept. of EECS, Korea Advanced Institute of Science and Technology:National Nanofab Center |
| Date | 2009-06-24 |
| Paper # | ED2009-69,SDM2009-64 |
| Volume (vol) | vol.109 |
| Number (no) | 98 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |