講演名 | 2009-06-24 A Study on Lateral Surface Treatment of the CdTe X-ray image-sensor , |
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抄録(和) | |
抄録(英) | A CdTe X-ray sensor for dental X-ray imaging is fabricated and the effect of a lateral surface treatment is investigated. Due to non-uniform edge pixels in the CdTe X-ray sensor, the number of effective pixels that can be used for the final image is reduced, and a line defect is introduced when several sensors are put together for the target resolution. To improve the roughness of the lateral surface, a lateral surface polishing process is introduced. The polishing process reduces dead pixels by 76%, from 304 to 76. By lateral surface polishing, most of the dead pixels near the device edge become normal pixels. The non-uniform edge pixels are improved by the lateral surface treatment without affecting the central pixels of the CdTe X-ray image sensor. The effective resolution is extended to the edges of device; therefore, the entire area of the CdTe X-ray sensor can be used for the final image. |
キーワード(和) | |
キーワード(英) | CdTe / X-ray / Medical imaging sensor / Lateral surface / Surface treatment |
資料番号 | ED2009-69,SDM2009-64 |
発行日 |
研究会情報 | |
研究会 | SDM |
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開催期間 | 2009/6/17(から1日開催) |
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委員長氏名(和) | |
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幹事氏名(和) | |
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幹事補佐氏名(和) | |
幹事補佐氏名(英) |
講演論文情報詳細 | |
申込み研究会 | Silicon Device and Materials (SDM) |
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本文の言語 | ENG |
タイトル(和) | |
サブタイトル(和) | |
タイトル(英) | A Study on Lateral Surface Treatment of the CdTe X-ray image-sensor |
サブタイトル(和) | |
キーワード(1)(和/英) | / CdTe |
第 1 著者 氏名(和/英) | / Jin Kwan Kim |
第 1 著者 所属(和/英) | Dept. of EECS, Korea Advanced Institute of Science and Technology |
発表年月日 | 2009-06-24 |
資料番号 | ED2009-69,SDM2009-64 |
巻番号(vol) | vol.109 |
号番号(no) | 98 |
ページ範囲 | pp.- |
ページ数 | 4 |
発行日 |