| Presentation | 2009-06-24 Design of 30nm FinFET with Halo Structure Tetsuo Endoh, Koji Sakui, Yukio Yasuda, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Design of 30nm FinFETs with halo structure for suppressing the threshold voltage roll-off and improving the subthreshold swing at the same time is proposed for the first time. The performances of nano scale FinFETs with halo structure are analyzed using a two-dimensional device simulator. The device characteristics, focusing especially on the threshold voltage and subthreshold slope, are investigated for different gate length, body thickness, and halo impurity concentration. From the viewpoint of body potential control, it is made clear on how to design the halo structure to suppress the short channel effects and improve the subthreshold-slope. It is shown that by introducing the halo structure to FinFETs, nano-scale FinFETs achieves an improved S-factor and suppressed Vth roll-off simultaneously. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | FinFET / Halo I/I / MOSFET / threshold voltage roll-off / S-factor / device design |
| Paper # | ED2009-64,SDM2009-59 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2009/6/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Design of 30nm FinFET with Halo Structure |
| Sub Title (in English) | |
| Keyword(1) | FinFET |
| Keyword(2) | Halo I/I |
| Keyword(3) | MOSFET |
| Keyword(4) | threshold voltage roll-off |
| Keyword(5) | S-factor |
| Keyword(6) | device design |
| 1st Author's Name | Tetsuo Endoh |
| 1st Author's Affiliation | Center for Interdisciplinary Research, TOHOKU UNIVERSITY:JST CREST() |
| 2nd Author's Name | Koji Sakui |
| 2nd Author's Affiliation | Center for Interdisciplinary Research, TOHOKU UNIVERSITY:JST CREST |
| 3rd Author's Name | Yukio Yasuda |
| 3rd Author's Affiliation | Center for Interdisciplinary Research, TOHOKU UNIVERSITY:JST CREST |
| Date | 2009-06-24 |
| Paper # | ED2009-64,SDM2009-59 |
| Volume (vol) | vol.109 |
| Number (no) | 98 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |