| Presentation | 2009-06-24 Metrology of microscopic properties of graphene on SiC M. Nagase, H. Hibino, H. Kageshima, H Yamaguchi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Graphene has recently attracted a lot of research interest because of its superior electric properties. Thermally grown epitaxial graphene on SiC substrate is promising for future electronic devices because of its compatibility with existing wafer-scale manufacturing. In this paper, microscopic metrological methods for graphene on SiC will be discussed. A layer number determination method using low-energy electron microscopy (LEEM) enables us to control the layer number and morphology of few-layer graphene. Local conductance measurements using an integrated nanogap probe based on scanning probe microscopy reveal the electrical properties of graphene nanoislands and double-layer graphene sheets on SiC. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Graphene / SiC / low-energy electron microscopy (LEEM) / scanning probe microscopy (SPM) / nano-gap electrode / local conductance |
| Paper # | ED2009-61,SDM2009-56 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2009/6/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Metrology of microscopic properties of graphene on SiC |
| Sub Title (in English) | |
| Keyword(1) | Graphene |
| Keyword(2) | SiC |
| Keyword(3) | low-energy electron microscopy (LEEM) |
| Keyword(4) | scanning probe microscopy (SPM) |
| Keyword(5) | nano-gap electrode |
| Keyword(6) | local conductance |
| 1st Author's Name | M. Nagase |
| 1st Author's Affiliation | NTT Basic Research Labs., Nippon Telegraph and Telephone Corp.() |
| 2nd Author's Name | H. Hibino |
| 2nd Author's Affiliation | NTT Basic Research Labs., Nippon Telegraph and Telephone Corp. |
| 3rd Author's Name | H. Kageshima |
| 3rd Author's Affiliation | NTT Basic Research Labs., Nippon Telegraph and Telephone Corp. |
| 4th Author's Name | H Yamaguchi |
| 4th Author's Affiliation | NTT Basic Research Labs., Nippon Telegraph and Telephone Corp. |
| Date | 2009-06-24 |
| Paper # | ED2009-61,SDM2009-56 |
| Volume (vol) | vol.109 |
| Number (no) | 98 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |