Presentation | 2009-07-23 Preparation of Polymeric Thin Films by Ion-Assisted Vapor Deposition Hiroaki USUI, Syunsuke SOTOWA, Kuniaki TANAKA, Kazuo SENDA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | A new method of polymer deposition was developed by combining physical vapor deposition of acryl monomer and ion irradiation to the substrate. In a high-vacuum chamber, zinc acrylate (ZnAc) monomer was evaporated at a deposition rate of 0.8 nm/min, while nitrogen ions were irradiated on the substrate surface at a current density of 0.5μA/cm^2 and energy of 500 to 2000eV from an electron-bombardment type ion source. The films were prepared on Au-coated glass plates and PET films. Infrared spectra of the deposited films showed that the absorption of vinyl group decreases with increasing ion energy. It was also found that the solubility of the film to an organic solvent decreases and film surface roughness is improved with increasing ion energy. These results suggest that ion irradiation can assist the polymerization of deposited monomer, and is effective for preparing uniform and smooth polymeric thin films. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | ion irradiation / deposition polymerization / polymer thin film / acryl monomer |
Paper # | OME2009-29 |
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Conference Information | |
Committee | OME |
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Conference Date | 2009/7/16(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Organic Material Electronics (OME) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Preparation of Polymeric Thin Films by Ion-Assisted Vapor Deposition |
Sub Title (in English) | |
Keyword(1) | ion irradiation |
Keyword(2) | deposition polymerization |
Keyword(3) | polymer thin film |
Keyword(4) | acryl monomer |
1st Author's Name | Hiroaki USUI |
1st Author's Affiliation | Tokyo University of Agriculture and Technology() |
2nd Author's Name | Syunsuke SOTOWA |
2nd Author's Affiliation | Tokyo University of Agriculture and Technology |
3rd Author's Name | Kuniaki TANAKA |
3rd Author's Affiliation | Tokyo University of Agriculture and Technology |
4th Author's Name | Kazuo SENDA |
4th Author's Affiliation | Tokyo University of Agriculture and Technology:Sumitomo Precision Products Co. Ltd. |
Date | 2009-07-23 |
Paper # | OME2009-29 |
Volume (vol) | vol.109 |
Number (no) | 147 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |