Presentation 2009-07-23
Preparation of Polymeric Thin Films by Ion-Assisted Vapor Deposition
Hiroaki USUI, Syunsuke SOTOWA, Kuniaki TANAKA, Kazuo SENDA,
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Abstract(in English) A new method of polymer deposition was developed by combining physical vapor deposition of acryl monomer and ion irradiation to the substrate. In a high-vacuum chamber, zinc acrylate (ZnAc) monomer was evaporated at a deposition rate of 0.8 nm/min, while nitrogen ions were irradiated on the substrate surface at a current density of 0.5μA/cm^2 and energy of 500 to 2000eV from an electron-bombardment type ion source. The films were prepared on Au-coated glass plates and PET films. Infrared spectra of the deposited films showed that the absorption of vinyl group decreases with increasing ion energy. It was also found that the solubility of the film to an organic solvent decreases and film surface roughness is improved with increasing ion energy. These results suggest that ion irradiation can assist the polymerization of deposited monomer, and is effective for preparing uniform and smooth polymeric thin films.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) ion irradiation / deposition polymerization / polymer thin film / acryl monomer
Paper # OME2009-29
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Conference Information
Committee OME
Conference Date 2009/7/16(1days)
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Registration To Organic Material Electronics (OME)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Preparation of Polymeric Thin Films by Ion-Assisted Vapor Deposition
Sub Title (in English)
Keyword(1) ion irradiation
Keyword(2) deposition polymerization
Keyword(3) polymer thin film
Keyword(4) acryl monomer
1st Author's Name Hiroaki USUI
1st Author's Affiliation Tokyo University of Agriculture and Technology()
2nd Author's Name Syunsuke SOTOWA
2nd Author's Affiliation Tokyo University of Agriculture and Technology
3rd Author's Name Kuniaki TANAKA
3rd Author's Affiliation Tokyo University of Agriculture and Technology
4th Author's Name Kazuo SENDA
4th Author's Affiliation Tokyo University of Agriculture and Technology:Sumitomo Precision Products Co. Ltd.
Date 2009-07-23
Paper # OME2009-29
Volume (vol) vol.109
Number (no) 147
Page pp.pp.-
#Pages 4
Date of Issue