| Presentation | 2009-08-10 Changes in Chemical Bonding States of Diamond-Like Carbon Films by Atomic Hydrogen Irradiation Ryoichi OSOZAWA, Hideki NAKAZAWA, Tomohide OKUZAKI, Naoyuki SATOH, Yoshiharu ENTA, Maki SUEMITSU, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have deposited diamond-like carbon (DLC) films on Si substrate by pulsed laser deposition using KrF excimer laser, and investigated the effects of atomic-hydrogen irradiation on the chemical bonding and electronic states and the structure of the films by photoelectron spectroscopy (PES) using synchrotron radiation and Raman spectroscopy. The fraction of sp^3 bonds at the film surface, as evaluated from C1s and valence-band PES spectra, increased at a substrate temperature of 400℃ with increasing atomic-hydrogen exposure time, whereas the sp^3 fraction decreased at 700℃ with the exposure time. The Raman spectrum for the film exposed to atomic hydrogen at 400℃ showed that the clustering of sp^2 carbon progressed inside near the surface at such a low temperature. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Diamond-like carbon / Photoelectron spectroscopy / Atomic hydrogen |
| Paper # | CPM2009-37 |
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| Committee | CPM |
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| Conference Date | 2009/8/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Changes in Chemical Bonding States of Diamond-Like Carbon Films by Atomic Hydrogen Irradiation |
| Sub Title (in English) | |
| Keyword(1) | Diamond-like carbon |
| Keyword(2) | Photoelectron spectroscopy |
| Keyword(3) | Atomic hydrogen |
| 1st Author's Name | Ryoichi OSOZAWA |
| 1st Author's Affiliation | Faculty of Science and Technology, Hirosaki University() |
| 2nd Author's Name | Hideki NAKAZAWA |
| 2nd Author's Affiliation | Faculty of Science and Technology, Hirosaki University |
| 3rd Author's Name | Tomohide OKUZAKI |
| 3rd Author's Affiliation | Faculty of Science and Technology, Hirosaki University |
| 4th Author's Name | Naoyuki SATOH |
| 4th Author's Affiliation | Faculty of Science and Technology, Hirosaki University |
| 5th Author's Name | Yoshiharu ENTA |
| 5th Author's Affiliation | Faculty of Science and Technology, Hirosaki University |
| 6th Author's Name | Maki SUEMITSU |
| 6th Author's Affiliation | Research Institute of Electrical Communication, Tohoku University |
| Date | 2009-08-10 |
| Paper # | CPM2009-37 |
| Volume (vol) | vol.109 |
| Number (no) | 171 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |