| Presentation | 2009-07-21 Fabrication of NbN Josephson Junctions with Plasma-Nitrided AlN barriers Yuki NAGAI, Naoto NAITO, Hiroyuki AKAIKE, Akira FUJIMAKI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We present the preparation process of plasma-nitrided AlNx barriers for NbN Josephson junctions and the electrical characteristics of the junctions. The plasma-nitided AlNx barrier will be used as an ultra-thin and homogeneous barrier layer which is needed to enhance the quality of NbN/AlN/NbNx/NbN junctions. In this work, we have investigated the relationship between the preparation conditions of plasma-nitrided AlNx barriers and the electrical characteristics of NbN/AlNx/NbN junctions. By adjusting the Al thickness and nitriding time, junctions showed underdamped current-voltage characteristics with low leakage current. The quality parameter V_m was 40mV in the junction with J_c=3.3kA/cm^2, and the junction resistance R_nA and J_c were 40～1500Ωμm^2 and ～7kA/cm^2, respectively. Evaluation of the spread in I_c showed that the minimum to maximum I_c spread was about ±3% in series of 100 junctions with an area of 100μm^2. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Plasma-Nitridation / AlN / NbN / Josephson junction |
| Paper # | SCE2009-14 |
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| Committee | SCE |
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| Conference Date | 2009/7/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of NbN Josephson Junctions with Plasma-Nitrided AlN barriers |
| Sub Title (in English) | |
| Keyword(1) | Plasma-Nitridation |
| Keyword(2) | AlN |
| Keyword(3) | NbN |
| Keyword(4) | Josephson junction |
| 1st Author's Name | Yuki NAGAI |
| 1st Author's Affiliation | Department of Quantum Engineering, Nagoya University() |
| 2nd Author's Name | Naoto NAITO |
| 2nd Author's Affiliation | Department of Quantum Engineering, Nagoya University |
| 3rd Author's Name | Hiroyuki AKAIKE |
| 3rd Author's Affiliation | Department of Quantum Engineering, Nagoya University |
| 4th Author's Name | Akira FUJIMAKI |
| 4th Author's Affiliation | Department of Quantum Engineering, Nagoya University |
| Date | 2009-07-21 |
| Paper # | SCE2009-14 |
| Volume (vol) | vol.109 |
| Number (no) | 141 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |