Presentation 2009-06-19
Mach-Zehnder type optical switch using MEMS phase shifter
Makoto INAMOTO, Takeo MARUYAMA, Koichi IIYAMA,
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Abstract(in English) We proposed and simulated the novel type Mach-Zehnder interferometric optical switching device using MEMS phase shifter. The phase shifter has an air-bridge waveguide and is able to stretch the length of the waveguide by applied voltage. As the analytical result, the amount of stretch length is 70nm at the applied voltage of 100V. The π-shift is achieved using cascade connections of 7 shifters. This switching device is very promising for the realization of low power consumption photonic integrated circuits.
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Keyword(in English) Optical switch / Mach-Zehnder interferometer / Micro-electro mechanical systems / Si wire waveguide
Paper # OPE2009-23,LQE2009-26
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Committee LQE
Conference Date 2009/6/12(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Mach-Zehnder type optical switch using MEMS phase shifter
Sub Title (in English)
Keyword(1) Optical switch
Keyword(2) Mach-Zehnder interferometer
Keyword(3) Micro-electro mechanical systems
Keyword(4) Si wire waveguide
1st Author's Name Makoto INAMOTO
1st Author's Affiliation Faculty of Engineering, Kanazawa University()
2nd Author's Name Takeo MARUYAMA
2nd Author's Affiliation Faculty of Engineering, Kanazawa University
3rd Author's Name Koichi IIYAMA
3rd Author's Affiliation Faculty of Engineering, Kanazawa University
Date 2009-06-19
Paper # OPE2009-23,LQE2009-26
Volume (vol) vol.109
Number (no) 93
Page pp.pp.-
#Pages 4
Date of Issue