| Presentation | 2009-06-19 Fabrication of PLZT thick films formed by aerosol deposition method and application for electro-optic spatial light modulator Takashi YAMAGUCHI, Akihiro KUME, Hironaga UCHIDA, Mitsuteru INOUE, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this study, electro-optic (EO) micro-cavity with a PLZT [(Pb_<0.91>,La_<0.09>)(Zr_<0.65>,Ti_<0.35>)O_3] thick film was fabricated by aerosol deposition (AD) method for applications in spatial light modulator (SLM). In the EO micro-cavity using the PLZT film, because a refractive index of the PLZT film is changed by applying an electrical field, an optical thickness of the PLZT film can change. Therefore, the wavelength of center of the localized mode will change, so that transmittance or reflectance of light changes even if wavelength of light is constant. When electric field of 400kV/cm was applied the micro-cavity with the PLZT, the wavelength of center of the localized mode was shifted about 1.0nm at 777nm, and the change of 7.2% in the reflectance was obtained. Furthermore, we tried to fabricate an electro-optic spatial light modulator (EOSLM) with two dimensional 2x2 pixels, which was used the PLZT film deposited by the AD method. When electrical field of 400kV/cm was applied to a pixel of the EOSLM, changes in its reflectance was observed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Aerosol deposition method / PLZT / Electro-optic spatial light modulator / Micro-cavity |
| Paper # | EMD2009-16,CPM2009-28,OME2009-23 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 2009/6/12(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of PLZT thick films formed by aerosol deposition method and application for electro-optic spatial light modulator |
| Sub Title (in English) | |
| Keyword(1) | Aerosol deposition method |
| Keyword(2) | PLZT |
| Keyword(3) | Electro-optic spatial light modulator |
| Keyword(4) | Micro-cavity |
| 1st Author's Name | Takashi YAMAGUCHI |
| 1st Author's Affiliation | Toyohashi University of Technology() |
| 2nd Author's Name | Akihiro KUME |
| 2nd Author's Affiliation | Toyohashi University of Technology |
| 3rd Author's Name | Hironaga UCHIDA |
| 3rd Author's Affiliation | Touhoku Institute of Technology |
| 4th Author's Name | Mitsuteru INOUE |
| 4th Author's Affiliation | Toyohashi University of Technology |
| Date | 2009-06-19 |
| Paper # | EMD2009-16,CPM2009-28,OME2009-23 |
| Volume (vol) | vol.109 |
| Number (no) | 89 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |