| Presentation | 2009-03-14 Visual Inspection of Pattern Defect Based on Self-reference Tetsuya ASAMI, Toshikazu WADA, Kaoru SAKAI, Shunji MAEDA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper presents a visual inspection method for detecting LSI wafer defects. Recently the density of LSI circuit patterns are rapidly increasing. Even in such a high density patterns, fast and accurate defect detection is still highly demanded. Some of the small defects can be analyzed only by using SEM, however, for faster detection without stopping the production lines, visual inspection using microscopic camera is necessary. The microscopic images of LSI circuit patterns can be affected by intensity variation caused by light interference in the thin layers. In most of the cases, the range of the intensity variation caused by interference is bigger than that caused by a defect. For detecting defects under such severe intensity variation, we propose self referencing image transform. Self referencing is actually a subtraction of local image from the most similar local image, which can be found by nearest neighbor search. By performing the self referencing image transforms on a defect-less die image and inspection die image, we can find the difference between these dies without affected by the intensity variation. We further extend this basic procedure so as to increase the accuracy. We tested the resulting algorithm on real images and confirmed its accuracy. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Comparative inspection / Defect detection / Visual inspetcion / Self reference |
| Paper # | PRMU2008-283 |
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| Conference Information | |
| Committee | PRMU |
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| Conference Date | 2009/3/6(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Pattern Recognition and Media Understanding (PRMU) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Visual Inspection of Pattern Defect Based on Self-reference |
| Sub Title (in English) | |
| Keyword(1) | Comparative inspection |
| Keyword(2) | Defect detection |
| Keyword(3) | Visual inspetcion |
| Keyword(4) | Self reference |
| 1st Author's Name | Tetsuya ASAMI |
| 1st Author's Affiliation | Faculity of Systems Engineering, Wakayama University() |
| 2nd Author's Name | Toshikazu WADA |
| 2nd Author's Affiliation | Faculity of Systems Engineering, Wakayama University |
| 3rd Author's Name | Kaoru SAKAI |
| 3rd Author's Affiliation | Hitachi, LTD., Production Engineering Research Laboratory |
| 4th Author's Name | Shunji MAEDA |
| 4th Author's Affiliation | Hitachi, LTD., Production Engineering Research Laboratory |
| Date | 2009-03-14 |
| Paper # | PRMU2008-283 |
| Volume (vol) | vol.108 |
| Number (no) | 484 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |