| Presentation | 2009-03-10 Derivation of Dynamical Equations of Coupled MEMS Gyroscopes Suketu NAIK, Takashi HIKIHARA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Vibratory gyroscopes are utilized to detect angles of rotation or rates of angular rotation. A typical gyroscope includes drive mode and sense mode which allows the measurement of rotational force, known as the Coriolis force, applied orthogonally to the plane of motion. In the presence of this force, the gyroscope produces a change in acceleration in drive mode which in turn causes motion in sense mode. This motion can be converted into angular rate and the input force can be estimated. Such angular rate sensors can be coupled to enhance their sensitivities by allowing them to act as a system of sensors. To help understand the dynamics underlying such coupled system, prototype devices have been fabricated in open ended coupling scheme in PolyMUMPs process. In this research, coupled dynamics of these particular devices are targeted. Furthermore, the global behavior of the coupled system will be numerically investigated in various regimes where the devices can be operated. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Nonlinear Dynamics / Gyroscope / Coriolis Force / MEMS / Sensors |
| Paper # | NLP2008-152 |
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| Conference Information | |
| Committee | NLP |
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| Conference Date | 2009/3/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Nonlinear Problems (NLP) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Derivation of Dynamical Equations of Coupled MEMS Gyroscopes |
| Sub Title (in English) | |
| Keyword(1) | Nonlinear Dynamics |
| Keyword(2) | Gyroscope |
| Keyword(3) | Coriolis Force |
| Keyword(4) | MEMS |
| Keyword(5) | Sensors |
| 1st Author's Name | Suketu NAIK |
| 1st Author's Affiliation | Department of Electrical Engineering, Kyoto University() |
| 2nd Author's Name | Takashi HIKIHARA |
| 2nd Author's Affiliation | Department of Electrical Engineering, Kyoto University |
| Date | 2009-03-10 |
| Paper # | NLP2008-152 |
| Volume (vol) | vol.108 |
| Number (no) | 477 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |